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759554
Zirconium(IV)-tert-butoxid
packaged for use in deposition systems
Synonym(e):
Tetra-tert.-butyl-zirkonat
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Über diesen Artikel
Lineare Formel:
Zr[OC(CH3)3]4
CAS-Nummer:
Molekulargewicht:
383.68
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
MDL number:
Beilstein/REAXYS Number:
3681870
form
liquid
reaction suitability
core: zirconium
refractive index
n20/D 1.424 (lit.)
bp
81 °C/3 mmHg (lit.)
density
0.985 g/mL at 25 °C (lit.)
SMILES string
CC(C)(C)O[Zr](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C
InChI
1S/4C4H9O.Zr/c4*1-4(2,3)5;/h4*1-3H3;/q4*-1;+4
InChI key
BGGIUGXMWNKMCP-UHFFFAOYSA-N
Application
Zirconium tert-butoxide (ZTB) precursor is used to deposit thin films of Zirconia and other zirconium containing films by atomic layer deposition and chemical vapor deposition methods. Zirconium oxide thin films can also be grown at low temperatures, ranging from 150°C to 300°C, by the presence of moisture along with ZTB or by UV-enhanced atomic layer deposition (UV-ALD) process.
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signalword
Warning
hcodes
Hazard Classifications
Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3
target_organs
Respiratory system
Lagerklasse
10 - Combustible liquids
wgk
WGK 3
flash_point_f
183.2 °F - closed cup
flash_point_c
84 °C - closed cup
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