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重要文件

40267

Sigma-Aldrich

过氧化氢 溶液

semiconductor grade PURANAL (Honeywell 17948), ≥30%

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About This Item

經驗公式(希爾表示法):
H2O2
CAS號碼:
分子量::
34.01
Beilstein:
3587191
MDL號碼:
分類程式碼代碼:
12352300
PubChem物質ID:
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等級

semiconductor grade PURANAL (Honeywell 17948)

蒸汽壓力

23.3 mmHg ( 30 °C)

化驗

≥30%

CofA

specification on request

反應適用性

reagent type: oxidant

密度

1.110 g/cm3

儲存溫度

2-8°C

SMILES 字串

OO

InChI

1S/H2O2/c1-2/h1-2H

InChI 密鑰

MHAJPDPJQMAIIY-UHFFFAOYSA-N

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一般說明

Hydrogen peroxide is a strong oxidizer. It may be produced industrially by anthraquinone oxidation.[1] it is used in semiconductor industry essentially for cleaning silicon wafers, removal of photoresists and to etch metallic copper on printed circuit boards. Ultrapurification of hydrogen peroxide by reverse osmosis has been reported in detail. [2]

應用

Semiconductor grade hydrogen peroxide was used to etch TiN[3] 2 and GaAs structures. [4]

法律資訊

PURANAL is a trademark of Honeywell Specialty Chemicals Seelze GmbH

象形圖

Corrosion

訊號詞

Danger

危險聲明

危險分類

Aquatic Chronic 3 - Eye Dam. 1

儲存類別代碼

5.1B - Oxidizing hazardous materials

水污染物質分類(WGK)

WGK 1

閃點(°F)

Not applicable

閃點(°C)

Not applicable

個人防護裝備

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter


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TiN metal hardmask etch residue removal on advanced porous low-k and Cu device with corner rounding scheme
Cui H, et al.
Solid State Phenomena, 187 (2012)
Localized GaAs etching with acidic hydrogen peroxide solutions
Shaw DW, et al.
Journal of the Electrochemical Society, 128(4), 874-880 (1981)
Ultrapurification of hydrogen peroxide solution from ionic metals impurities to semiconductor grade by reverse osmosis.
Abejon R, et al.
Separation and Purification Technology, 76(1), 44-51 (2010)
Jose M Campos-Martin et al.
Angewandte Chemie (International ed. in English), 45(42), 6962-6984 (2006-10-14)
Hydrogen peroxide (H2O2) is widely used in almost all industrial areas, particularly in the chemical industry and environmental protection. The only degradation product of its use is water, and thus it has played a large role in environmentally friendly methods
Shoichi Iriguchi et al.
Blood, 125(2), 370-382 (2014-10-29)
Although overexpression of T-bet, a master transcription factor in type-1 helper T lymphocytes, has been reported in several hematologic and immune diseases, its role in their pathogenesis is not fully understood. In the present study, we used transgenic model mice

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