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553468

Sigma-Aldrich

Tris(tert-butoxy)silanol

99.999%

Sinonimo/i:

TBS

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About This Item

Formula condensata:
((CH3)3CO)3SiOH
Numero CAS:
18166-43-3
Peso molecolare:
264.43
Numero MDL:
MFCD00271024
Codice UNSPSC:
12352103
ID PubChem:
24879332
NACRES:
NA.23

Saggio

99.999%

Forma fisica

solid

P. eboll.

205-210 °C (lit.)

Punto di fusione

63-65 °C (lit.)

Stringa SMILE

CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C

InChI

1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3
HLDBBQREZCVBMA-UHFFFAOYSA-N

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Categorie correlate

Descrizione generale

Tris(tert-butoxy)silanol can react with various metal alkyl amides to act as precursors for vapor deposition metal silicates. It also acts as a suitable precursor for deposition of silica.

Applicazioni

Tris(tert-alkoxy)silanols reacts with tetrakis(dimethylamino)-hafnium vapor(Hf(N(CH3)2)4) for vapor phase deposition of hafnium silicate glass films. Tris(tert-butoxy)silanol is used for atomic layer deposition (ALD) of highly conformal layers of amorphous silicon dioxide and aluminum oxide nanolaminates.

Codice della classe di stoccaggio

11 - Combustible Solids

Classe di pericolosità dell'acqua (WGK)

WGK 3

Punto d’infiammabilità (°F)

Not applicable

Punto d’infiammabilità (°C)

Not applicable

Dispositivi di protezione individuale

Eyeshields, Gloves, type N95 (US)

Certificati d'analisi (COA)

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