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463027

Sigma-Aldrich

Germane

electronic grade, ≥99.997%

Sinonimo/i:

Germanium tetrahydride, Germanium(4+) hydride, Monogermane, Tetrahydrogermane

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About This Item

Formula condensata:
GeH4
Numero CAS:
7782-65-2
Peso molecolare:
76.67
Numero CE:
231-961-6
Numero MDL:
MFCD00011028
Codice UNSPSC:
12352300
ID PubChem:
24869887

Grado

electronic grade

Densità del vapore

1.53 (−142 °C, vs air)

Saggio

≥99.997%

Stato

gas

Impurezze

<0.5 ppm Oxygen (O2)
<1 ppm Carbon monoxide + Trigermane (CO+Ge3H8)
<1 ppm THC
<1 ppm Water (H2O)
<2 ppm Carbon dioxide (CO2)
<2 ppm Nitrogen (N2)
<20 ppm Digermane (Ge2H6)
<5 ppm Chlorogermanes
<5 ppm Germoxanes
<50 ppm Hydrogen (H2)

P. ebollizione

−88.4 °C (lit.)

Punto di fusione

−165 °C (lit.)

Temp. transizione

critical temperature 35 °C

Stringa SMILE

[GeH4]

InChI

1S/GeH4/h1H4
QUZPNFFHZPRKJD-UHFFFAOYSA-N

Caratteristiche e vantaggi

Germane gas is used in the deposition of epitaxial and amorphous SiGe alloy layers used in the production of high performance devices including photovoltaic cells and integrated circuits (IC). Precursor to germanium-containing thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE). A CVD precursor for germanium carbide semiconducting films.

Prodotti consigliati

Stainless steel regulators Z527416 or Z527424 are recommended.

Avvertenze

Danger

Indicazioni di pericolo

H220,H280,H302,H330

Classi di pericolo

Acute Tox. 2 Inhalation - Acute Tox. 4 Oral - Flam. Gas 1A - Press. Gas Compr. Gas

Codice della classe di stoccaggio

2A - Gases

Classe di pericolosità dell'acqua (WGK)

WGK 3

Punto d’infiammabilità (°F)

Not applicable

Punto d’infiammabilità (°C)

Not applicable

Dispositivi di protezione individuale

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)

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Certificati d'analisi (COA)

Lot/Batch Number
04245HH
15013TQ
12474CC
14813TQ
07406HO

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