463019

Silicium(IV)-fluorid

electronic grade, ≥99.99%

• Synonym(e): Silizium(IV)-fluorid
• Lineare Formel: SiF₄
• CAS-Nummer: 7783-61-1
• Molekulargewicht: 104.08
• EG-Nummer: 232-015-5
• MDL-Nummer: MFCD00040533
• UNSPSC-Code: 12352300
• PubChem Substanz-ID: 24869885
• NACRES: NA.23

Eigenschaften

• Qualität: electronic grade
• Assay: ≥99.99%
• Form: liquid
• Eignung der Reaktion: core: silicon
• Verunreinigungen: <0.5 ppm Carbon monoxide (CO); <1 ppm Argon + oxygen (Ar + O₂); <1 ppm Carbon dioxide (CO₂); <10 ppm Methane (CH₄); <3 ppm Nitrogen (N₂); <50 ppm Hydrogen fluoride (HF)
• bp: −86 °C (lit.)
• mp (Schmelzpunkt): −90 °C (lit.)
• Übergangstemp.: critical temperature −14.2 °C
• Dichte: 3.57 g/mL at 25 °C (lit.)
• SMILES String: F[Si](F)(F)F
• InChI: 1S/F4Si/c1-5(2,3)4
• InChIKey: ABTOQLMXBSRXSM-UHFFFAOYSA-N

Beschreibung

Anwendung

Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF₄-SiH₄-H₂ have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD). Such fluorinated thin films show visible photoluminescence (PL) at room temperature.

Verpackung

Packaged in carbon steel lecture bottles with CGA 330 diaphragm valve

Sonstige Hinweise

See Technical Information Bulletin AL-151 Gas Regulators: Selection, Installation, and Operation

Rechtliche Hinweise

Aldrich is a registered trademark of Sigma-Aldrich Co. LLC

Sicherheitshinweise

• Piktogramme: GHS04,GHS06,GHS05
• Signalwort: Danger
• H-Sätze: H280,H314,H330
• P-Sätze: P260 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338 - P410 + P403
• Gefahreneinstufungen: Acute Tox. 2 Inhalation - Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1A
• Zusätzliche Gefahrenhinweise: EUH014,EUH029
• Lagerklassenschlüssel: 2A - Gases
• WGK: WGK 3
• Flammpunkt (°F): Not applicable
• Flammpunkt (°C): Not applicable
• Persönliche Schutzausrüstung: Faceshields, Gloves, Goggles