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Merck
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文件

760404

乙醇钽(V)

packaged for use in deposition systems

同義詞:

PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide

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About This Item

線性公式:
Ta(OC2H5)5
CAS號碼:
分子量::
406.25
Beilstein:
3678999
EC號碼:
MDL號碼:
分類程式碼代碼:
12352103
PubChem物質ID:
NACRES:
NA.23

形狀

liquid

折射率

n20/D 1.487 (lit.)

bp

155 °C/0.01 mmHg (lit.)

mp

21 °C (lit.)

密度

1.566 g/mL at 25 °C (lit.)

SMILES 字串

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5

InChI 密鑰

HSXKFDGTKKAEHL-UHFFFAOYSA-N

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應用

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

象形圖

Flame

訊號詞

Warning

危險聲明

危險分類

Flam. Liq. 3

儲存類別代碼

3 - Flammable liquids

水污染物質分類(WGK)

WGK 1

閃點(°F)

84.2 °F - closed cup

閃點(°C)

29 °C - closed cup


分析證明 (COA)

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