333891

シラン

≥99.998%, electronic grade

• 別名: 四水素化ケイ素
• 化学式: SiH₄
• CAS番号: 7803-62-5
• 分子量: 32.12
• EC Number: 232-263-4
• MDL番号: MFCD00011228
• UNSPSCコード: 12352300
• PubChem Substance ID: 24860199

特性

• グレード: electronic grade
• 蒸気密度: 1.1 (vs air)
• アッセイ: ≥99.998%
• 形状: gas
• 抵抗性: >1000 Ω-cm
• 不純物: <1 ppm Carbon dioxide (CO₂); <1 ppm Carbon monoxide (CO); <1 ppm Chlorosilanes; <1 ppm THC; <1 ppm Trisilane (Si₃H₈); <1 ppm Water (H₂O); <100 ppm Hydrogen (H₂); <2 ppm Nitrogen (N₂); <2 ppm Siloxanes; <5 ppm Disilane (Si₂H₆)
• bp: −112 °C (lit.)
• mp: −185 °C (lit.)
• 転移温度: critical temperature −3.4 °C
• 密度: 1.114 g/mL at 25 °C (lit.)
• SMILES記法: [SiH4]

詳細

アプリケーション

Silane is used in the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics. Polycrystalline films can be deposited on silicon wafers and glass substrates via remote plasma chemical vapor deposition (RPCVD) using a SiH₄-SiF₂-H₂ gas mixture. Silane is used widely as a dopant in the formation of III-IV semiconductor materials.

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安全性情報

• ピクトグラム: GHS02,GHS04
• シグナルワード: Danger
• 危険有害性情報: H220,H280
• 注意書き: P210 - P377 - P381 - P410 + P403
• 危険有害性の分類: Flam. Gas 1A - Press. Gas Compr. Gas
• 保管分類コード: 2A - Gases
• WGK: WGK 1
• 引火点(°F): Not applicable
• 引火点(℃): Not applicable
• 個人用保護具 (PPE): Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)