669008

四(二甲基胺基)钛(IV)

packaged for use in deposition systems

• 别名: TDMAT, 四(二甲基氨基)钛(IV)
• 线性分子式: [(CH₃)₂N]₄Ti
• CAS号: 3275-24-9
• 分子量: 224.17
• EC 号: 221-904-3
• MDL编号: MFCD00014861
• UNSPSC代码: 12352103
• PubChem化学物质编号: 24885015
• NACRES: NA.23

属性

• 质量水平: 100
• 方案: 99.999% (trace metals analysis)
• 表单: liquid
• 反应适用性: core: titanium
• 沸点: 50 °C/0.5 mmHg (lit.)
• 密度: 0.947 g/mL at 25 °C (lit.)
• SMILES字符串: CN(C)[Ti](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
• InChI key: MNWRORMXBIWXCI-UHFFFAOYSA-N

说明

一般描述

Atomic number of base material: 22 Titanium

应用

Precursors Packaged for Depositions Systems

The product is a precursor for the deposition of titanium dioxide thin films by atomic layer deposition with water. Tetrakis(dimethylamido)titanium(IV) (TDMAT) undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

安全信息

• 象形图: GHS02,GHS05
• 警示用语：: Danger
• 危险声明: H225,H260,H314
• 预防措施声明: P210 - P223 - P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• 危险分类: Flam. Liq. 2 - Skin Corr. 1B - Water-react 1
• 补充剂危害: EUH014
• 储存分类代码: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• 闪点(°F): -22.0 °F - closed cup
• 闪点(°C): -30 °C - closed cup
• 个人防护装备: Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter