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Merck

469858

Sigma-Aldrich

四(二甲基胺基)钛(IV)

99.999% trace metals basis

别名:

TDMAT, 四(二甲基氨基)钛(IV)

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About This Item

线性分子式:
[(CH3)2N]4Ti
CAS号:
分子量:
224.17
EC號碼:
MDL號碼:
分類程式碼代碼:
12352103
PubChem物質ID:
NACRES:
NA.23

品質等級

化驗

99.999% trace metals basis

形狀

liquid

反應適用性

core: titanium

bp

50 °C/0.5 mmHg (lit.)

密度

0.947 g/mL at 25 °C (lit.)

SMILES 字串

CN(C)[Ti](N(C)C)(N(C)C)N(C)C

InChI

1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4

InChI 密鑰

MNWRORMXBIWXCI-UHFFFAOYSA-N

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應用

Tetrakis(二甲基氨基)钛(IV)(TDMAT)是通过有机金属化学气相沉积(OMCVD)和通过原子层沉积(ALD)的二氧化钛薄膜的氮化钛(TiN)薄膜的前体。TDMAT 与过量的环戊二烯发生放热反应得到三(二甲基氨基)(η5-环戊二烯基)钛(IV)。

象形圖

FlameCorrosion

訊號詞

Danger

危險聲明

危險分類

Flam. Liq. 2 - Skin Corr. 1B - Water-react 1

安全危害

儲存類別代碼

4.3 - Hazardous materials which set free flammable gases upon contact with water

水污染物質分類(WGK)

WGK 3

閃點(°F)

-22.0 °F - closed cup

閃點(°C)

-30 °C - closed cup

個人防護裝備

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter


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