所有图片(4)
About This Item
线性分子式:
((CH3)3CO)3SiOH
CAS号:
分子量:
264.43
MDL號碼:
分類程式碼代碼:
12352103
PubChem物質ID:
NACRES:
NA.23
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品質等級
化驗
99.999%
形狀
solid
bp
205-210 °C (lit.)
mp
63-65 °C (lit.)
SMILES 字串
CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C
InChI
1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3
InChI 密鑰
HLDBBQREZCVBMA-UHFFFAOYSA-N
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一般說明
三(叔丁氧基)硅烷醇可以与各种金属烷基酰胺反应，作为气相沉积金属硅酸盐的前体。它也是二氧化硅沉积的理想前体。
應用
三(叔丁氧基)硅烷醇与四(二甲基氨基)-铪蒸气（Hf(N(CH3)2)4）反应，用于硅酸铪玻璃膜的气相沉积。三(叔丁氧基)硅烷醇被用于无定形二氧化硅和氧化铝纳米层的高度共形层的原子层沉积（ALD）。
儲存類別代碼
11 - Combustible Solids
水污染物質分類（WGK）
WGK 3
閃點（°F）
Not applicable
閃點（°C）
Not applicable
個人防護裝備
Eyeshields, Gloves, type N95 (US)
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