760293

2,4,6,8-Tetramethylcyclotetrasiloxan

packaged for use in deposition systems

• Synonym(e): TMCTS
• Lineare Formel: (HSiCH₃O)₄
• CAS-Nummer: 2370-88-9
• Molekulargewicht: 240.51
• Beilstein: 1775282
• EG-Nummer: 219-137-4
• MDL-Nummer: MFCD00039567
• UNSPSC-Code: 12352103
• PubChem Substanz-ID: 329766852
• NACRES: NA.23

Eigenschaften

• Qualität: deposition grade
• Assay: ≥99.5% (GC); ≥99.999% (trace metals analysis)
• Form: liquid
• Brechungsindex: n20/D 1.387 (lit.)
• bp: 134 °C (lit.)
• mp (Schmelzpunkt): −69 °C (lit.)
• Dichte: 0.986 g/mL at 25 °C (lit.)
• Lagertemp.: 2-8°C
• SMILES String: C[SiH]1O[SiH](C)O[SiH](C)O[SiH](C)O1
• InChI: 1S/C4H16O4Si4/c1-9-5-10(2)7-12(4)8-11(3)6-9/h9-12H,1-4H3
• InChIKey: BQYPERTZJDZBIR-UHFFFAOYSA-N

Beschreibung

Anwendung

2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications

Leistungsmerkmale und Vorteile

Precursor for gate dielectrics in thin-film transistors (TFT), and is a component of photochemically formed SiO_X monolayers on TiO.

Sicherheitshinweise

• Piktogramme: GHS02
• Signalwort: Warning
• H-Sätze: H226
• Gefahreneinstufungen: Flam. Liq. 3
• Lagerklassenschlüssel: 3 - Flammable liquids
• WGK: WGK 3
• Flammpunkt (°F): 75.2 °F - closed cup
• Flammpunkt (°C): 24 °C - closed cup