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455199

Tetrakis(dimethylamido)hafnium(IV)

≥99.99%

Synonym(e):

TDMAH, Tetrakis-(dimethylamino)-hafnium(IV)

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Größe/SKUVerfügbarkeitPreis
25 g
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€ 1.160,00

Über diesen Artikel

Lineare Formel:
[(CH3)2N]4Hf
CAS-Nummer:
Molekulargewicht:
354.79
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352103
MDL number:

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Quality Segment

assay

≥99.99%

form

low-melting solid

reaction suitability

core: hafnium

mp

26-29 °C (lit.)

density

1.098 g/mL at 25 °C

SMILES string

CN(C)[Hf](N(C)C)(N(C)C)N(C)C

InChI

1S/4C2H6N.Hf/c4*1-3-2;/h4*1-2H3;/q4*-1;+4

InChI key

ZYLGGWPMIDHSEZ-UHFFFAOYSA-N

General description

Tetrakis(dimethylamido)hafnium(IV) is an organometallic compound consisting of a central hafnium atom (Hf) surrounded by four dimethylamido ligands (NMe2). It is commonly used as a CVD/ALD precursor to produce high-quality Hf thin films. It is a solid with low melting point.

Application

Tetrakis(dimethylamido)hafnium(IV) can be used:
  • As an atomic layer deposition(ALD) precursor for deposition of hafnium oxide thin films for advanced semiconductor devices.
  • As a precursor to fabricate polymer-derived ceramic nanocomposites.
  • To prepare HfO2, CeO2, and Ce-doped HfO2 thin films on Ge substrates by using tris(isopropyl-cyclopentadienyl)cerium [Ce(iPrCp)3] precursors with H2O via ALD method.
  • To produce Hf3N4 thin films with TDMAH and ammonia at low substrate temperatures at 150−250 °C.

Analysis Note

Purity excludes ~2000 ppm Zr.

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Dieser Artikel
666610455202669008
description

≥99.99%

description

packaged for use in deposition systems

description

99.99%

description

packaged for use in deposition systems

form

low-melting solid

form

low-melting solid

form

liquid

form

liquid

assay

≥99.99%

assay

≥99.99% (trace metals analysis)

assay

99.99%

assay

99.999% (trace metals analysis)

density

1.098 g/mL at 25 °C

density

1.098 g/mL at 25 °C

density

1.249 g/mL at 25 °C (lit.)

density

0.947 g/mL at 25 °C (lit.)

mp

26-29 °C (lit.)

mp

26-29 °C (lit.)

mp

-

mp

-

reaction suitability

core: hafnium

reaction suitability

core: hafnium

reaction suitability

core: hafnium

reaction suitability

core: titanium

Quality Level

100

Quality Level

100

Quality Level

100

Quality Level

100


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Piktogramme

FlameCorrosion

Signalwort

Danger

Gefahrencodes

supp_hazards

Lagerklasse

4.3 - Hazardous materials which set free flammable gases upon contact with water

Was ist los?

WGK 3

PSA (Persönliche Schutzausrüstung)

Eyeshields, Faceshields, Gloves, type P3 (EN 143) respirator cartridges

Hazard Classifications

Flam. Sol. 1 - Skin Corr. 1B - Water-react. 2



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Questions

1–2 of 2 Questions  
  1. How can I determine the shelf life / expiration / retest date of this product?

    1 answer
    1. If this product has an expiration or retest date, it will be shown on the Certificate of Analysis (COA, CofA). If there is no retest or expiration date listed on the product's COA, we do not have suitable stability data to determine a shelf life. For these products, the only date on the COA will be the release date; a retest, expiration, or use-by-date will not be displayed.
      For all products, we recommend handling per defined conditions as printed in our product literature and website product descriptions. We recommend that products should be routinely inspected by customers to ensure they perform as expected.
      For products without retest or expiration dates, our standard warranty of 1 year from the date of shipment is applicable.
      For more information, please refer to the Product Dating Information document: https://www.sigmaaldrich.com/deepweb/assets/sigmaaldrich/marketing/global/documents/418/501/product-dating-information-06-25-mk.pdf

      Helpful?

  2. How is shipping temperature determined? And how is it related to the product storage temperature?

    1 answer
    1. Products may be shipped at a different temperature than the recommended long-term storage temperature. If the product quality is sensitive to short-term exposure to conditions other than the recommended long-term storage, it will be shipped on wet or dry-ice. If the product quality is NOT affected by short-term exposure to conditions other than the recommended long-term storage, it will be shipped at ambient temperature. As shipping routes are configured for minimum transit times, shipping at ambient temperature helps control shipping costs for our customers. For more information, please refer to the Storage and Transport Conditions document: https://www.sigmaaldrich.com/deepweb/assets/sigmaaldrich/marketing/global/documents/316/622/storage-transport-conditions-mk.pdf

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