The 759562-25G product is packaged in a 50 cc 316SS cylinder with an opening of 1/4'' VCR. Its dimensions are 246.06 x 25.4 x 25.4 mm (L x W x D).
759562
Tris(dimethylamino)silane
packaged for use in deposition systems
Sinónimos:
Tris(dimethylamino)silane, (Me2N)3SiH, N,N,N′,N′,N′′, N′′-Hexamethylsilanetriamine, Tris(dimethylamido)silane, N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine, TDMAS
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About This Item
Fórmula lineal:
((CH3)2N)3SiH
Número de CAS:
Peso molecular:
161.32
Número CE:
Número MDL:
Código UNSPSC:
12352103
ID de la sustancia en PubChem:
NACRES:
NA.23
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Ensayo
≥99.9% (GC)
Formulario
liquid
bp
142 °C (lit.)
mp
−90 °C (lit.)
densidad
0.838 g/mL at 25 °C (lit.)
cadena SMILES
CN(C)[SiH](N(C)C)N(C)C
InChI
1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3
Clave InChI
TWVSWDVJBJKDAA-UHFFFAOYSA-N
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Descripción general
Tris(dimethylamino)silane is an organosilicon compound with high volatility and thermal stability, widely used as a vapor deposition precursor to fabricate silicon-containing thin films for various applications, including solar cells, fuel cell catalysts, and semiconductors. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range, thus making it a very good vapor deposition precursor.
Aplicación
Tris(dimethylamino)silane can be used:
- As a silicon source for deposition of aluminum silicate on TiO2 anodes for dye-sensitized solar cells vis atomic layer deposition method.
- As a precursor to fabricate functionalized Si reinforced separators for Li-ion batteries.
Palabra de señalización
Danger
Frases de peligro
Clasificaciones de peligro
Acute Tox. 3 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1B - Water-react 2
Riesgos supl.
Código de clase de almacenamiento
4.3 - Hazardous materials which set free flammable gases upon contact with water
Clase de riesgo para el agua (WGK)
WGK 3
Punto de inflamabilidad (°F)
16.0 - 32.0 °F - closed cup
Punto de inflamabilidad (°C)
-8.89 - 0.00 °C - closed cup
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Boudreau; M.; Boumerzoug; M.; Mascher; P.; Jessop; P. E.
Applied Physics Letters, 63, 3014-3014 (1993)
Hirose; F.; Kinoshita; Y.; Shibuya; S.; et al
Thin Solid Films, 519, 270-270 (2011)
B Ballantyne et al.
Toxicology and industrial health, 5(1), 45-54 (1989-01-01)
The acute handling hazards of tris(dimethylamino)silane [TDMAS] were investigated. The acute male rat peroral LD50 (with 95% confidence limits) was 0.71 (0.51-0.97) ml/kg, and the acute male rabbit percutaneous LD50 was 0.57 (0.35-0.92) ml/kg. The liquid was severely irritating to
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Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product.
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