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重要文件

647799

Sigma-Aldrich

wafer (single side polished), <111>, N-type, contains phosphorus as dopant, diam. × thickness 2 in. × 0.5 mm

同義詞:

Silicon element

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About This Item

線性公式:
Si
CAS號碼:
分子量::
28.09
MDL號碼:
分類程式碼代碼:
12352300
PubChem物質ID:
NACRES:
NA.23
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形狀

crystalline (cubic (a = 5.4037))
wafer (single side polished)

包含

phosphorus as dopant

直徑× 厚度

2 in. × 0.5 mm

bp

2355 °C (lit.)

mp

1410 °C (lit.)

密度

2.33 g/mL at 25 °C (lit.)

半導體屬性

<111>, N-type

SMILES 字串

[Si]

InChI

1S/Si

InChI 密鑰

XUIMIQQOPSSXEZ-UHFFFAOYSA-N

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物理性質

氧含量:≤ 1~1.8×1018/cm3;碳含量:≤ 5×1016/cm3;晶棒直径:1~8″
零涡旋缺陷。蚀坑密度 (EPD) < 100 (cm-2)。电阻率 10-3 - 40Ωcm

儲存類別代碼

13 - Non Combustible Solids

水污染物質分類(WGK)

WGK 2

閃點(°F)

Not applicable

閃點(°C)

Not applicable

個人防護裝備

Eyeshields, Gloves, type N95 (US)


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光阻套件為光刻製程提供預先稱重的化學成分,並針對不同的基板選擇提供獨立的蝕刻劑。

Photoresist kit offers pre-weighed chemical components for lithographic processes, with separate etchants for various substrate choices.

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