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重要文件

463027

Sigma-Aldrich

锗烷

electronic grade, ≥99.997%

同義詞:

Germanium tetrahydride, Germanium(4+) hydride, Monogermane, Tetrahydrogermane

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About This Item

線性公式:
GeH4
CAS號碼:
分子量::
76.67
EC號碼:
MDL號碼:
分類程式碼代碼:
12352300
PubChem物質ID:
暫時無法取得訂價和供貨情況

等級

electronic grade

蒸汽密度

1.53 (−142 °C, vs air)

化驗

≥99.997%

形狀

gas

雜質

<0.5 ppm Oxygen (O2)
<1 ppm Carbon monoxide + Trigermane (CO+Ge3H8)
<1 ppm THC
<1 ppm Water (H2O)
<2 ppm Carbon dioxide (CO2)
<2 ppm Nitrogen (N2)
<20 ppm Digermane (Ge2H6)
<5 ppm Chlorogermanes
<5 ppm Germoxanes
<50 ppm Hydrogen (H2)

bp

−88.4 °C (lit.)

mp

−165 °C (lit.)

轉變溫度

critical temperature 35 °C

SMILES 字串

[GeH4]

InChI

1S/GeH4/h1H4

InChI 密鑰

QUZPNFFHZPRKJD-UHFFFAOYSA-N

特點和優勢

锗烷气用于外延 和无定形硅锗合金层的沉积,以用于制造包括光伏电池和集成电路 (IC) 在内的高性能器件。通过化学气相沉积 (CVD) 和分子束外延 (MBE) 形成含锗薄膜时的前体。碳化锗半导体膜的 CVD 前体。

推薦產品

建议使用不锈钢调节器 Z527416 或 Z527424。

訊號詞

Danger

危險分類

Acute Tox. 2 Inhalation - Acute Tox. 4 Oral - Flam. Gas 1A - Press. Gas Compr. Gas

儲存類別代碼

2A - Gases

水污染物質分類(WGK)

WGK 3

閃點(°F)

Not applicable

閃點(°C)

Not applicable

個人防護裝備

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)


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