901481

Hexamethyldisilazane

10% solution in xylene

• Sinonimo/i: HMDS
• Formula condensata: C₆H₁₉NSi₂
• Numero CAS: 999-97-3
• Codice UNSPSC: 12352103
• NACRES: NA.23

Proprietà

• Forma fisica: liquid
• InChI: 1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3; FFUAGWLWBBFQJT-UHFFFAOYSA-N

Descrizione

Descrizione generale

The product is used to augment the adhesion of photoresist on silicon and SiO₂ surfaces.
The effectiveness of HMDS on adhesion is correlated with the reactivity of this compound with surface hydroxyl groups to form a new siloxane end product, i.e. Si-O-Si(CH₃)₃. This newly formed termination on the substrate renders the surface more hydrophobic in character and leads to greater wettability by photoresist. The latter condition is a crucial factor in good bonding. As a result of these altered characteristics due to the surface chemistry, the treated silicon surfaces become highly compatible with both negative and positive photoresists.

Applicazioni

HMDS preparations are generally applied to the silicon wafer while spinning, prior to the application of photoresist. As an alternative procedure, the wafers may be immersed in HMDS preparations and allowed to dry after removal.

Caratteristiche e vantaggi

• Ready-to-use preparations for surface treatment of silicon.
• Promotes photoresist adhesion on silicon and SiO₂ films.
• Prevents lift-off at edges of photoresist and reduces undercutting.
• Ensures full-line resolution.
• Improves yields of MOS and integrated silicon devices.

Informazioni sulla sicurezza

• Pittogrammi: GHS02,GHS06,GHS08
• Avvertenze: Danger
• Indicazioni di pericolo: H226,H304,H311,H315,H319,H332,H335,H373,H412
• Consigli di prudenza: P210 - P273 - P280 - P301 + P310 - P303 + P361 + P353 - P331
• Classi di pericolo: Acute Tox. 3 Dermal - Acute Tox. 4 Inhalation - Aquatic Chronic 3 - Asp. Tox. 1 - Eye Irrit. 2 - Flam. Liq. 3 - Skin Irrit. 2 - STOT RE 2 - STOT SE 3
• Organi bersaglio: hearing organs, Respiratory system
• Codice della classe di stoccaggio: 3 - Flammable liquids
• Classe di pericolosità dell'acqua (WGK): WGK 2
• Punto d’infiammabilità (°F): 77.0 °F
• Punto d’infiammabilità (°C): 25 °C