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463094

Sigma-Aldrich

Trimethylboron

electronic grade, ≥98.35%

Synonym(s):

Trimethylborane

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About This Item

Linear Formula:
B(CH3)3
CAS Number:
Molecular Weight:
55.91
EC Number:
MDL number:
UNSPSC Code:
12352300
PubChem Substance ID:

grade

electronic grade

assay

≥98.35%

form

gas

reaction suitability

core: boron

impurities

<1 ppm Oxygen (O2)
<1.5% Dimethylethylborane [B(CH3)2C2H5]
<10 ppm Carbon dioxide (CO2)
<10 ppm Nitrogen (N2)
<100 ppm Methane (CH4)
<1000 ppm Trimethylamine (TMA)
<50 ppm Hydrogen (H2)

bp

−20.2 °C (lit.)

mp

−161.5 °C (lit.)

SMILES string

CB(C)C

InChI

1S/C3H9B/c1-4(2)3/h1-3H3

InChI key

WXRGABKACDFXMG-UHFFFAOYSA-N

Application

Precursor to boron carbide thin films by chemical vapor deposition (CVD).[1]
Trimethylboron is used as an organometallic precursor for the CVD of boron-carbon containing films and as a boron source in the deposition of borophosphosilicate glass (BPSG).

Recommended products

Stainless steel regulators Z527416 or Z527424 are recommended.

pictograms

Gas cylinderCorrosion

signalword

Danger

hcodes

Hazard Classifications

Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B

Storage Class

2A - Gases

wgk_germany

WGK 1

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Faceshields, Gloves, Goggles, multi-purpose combination respirator cartridge (US)


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