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製造商/商標名
PDC-001-HP (Harrick Plasma)
高度 × 寬度 × 直徑
11 in. × 18 in. × 9 in.
重量
37
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一般說明
Our Expanded Cleaner is a larger tabletop plasma instrument with four times the capacity of the basic plasma cleaner, extensively used for nanoscale surface cleaning and surface activation.
- Larger, tabletop unit
- Adjustable RF power (Low, Medium, and High power settings)
- Applies a maximum of 30W to the RF coil
- Includes a 6" diameter x 6.5" length Pyrex chamber
- Hinged door with viewing window
- Active fan cooling
- Integral switch for a vacuum pump
- 1/8" NPT metering valve to qualitatively control gas flow and chamber pressure
- 1/8" NPT 3-way valve to quickly switch from introducing gas, venting and isolating the chamber
其他說明
Requirements
Our Plasma Cleaners require a gas-compatible vacuum pump with minimum pump speed of 23 L /min and ultimate total pressure of
200 mTorr or less
Our Plasma Cleaners require a gas-compatible vacuum pump with minimum pump speed of 23 L /min and ultimate total pressure of
200 mTorr or less
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