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蒸汽密度
>1 (vs air)
化驗
≥98%
形狀
liquid
折射率
n20/D 1.377 (lit.)
bp
101 °C (lit.)
101 °C
mp
−59 °C (lit.)
密度
0.764 g/mL at 20 °C (lit.)
SMILES 字串
C[Si](C)(C)O[Si](C)(C)C
InChI
1S/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H3
InChI 密鑰
UQEAIHBTYFGYIE-UHFFFAOYSA-N
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一般說明
六甲基二硅氧烷（HMDSO）是一种线性聚二硅氧烷 ，这种有机硅试剂通常被用作通过等离子体增强化学气相沉积（PE-CVD）技术制备硅化合物薄膜的源气体。在硅集成电路技术中，它还用作硅烷的替代品。已采用傅里叶变换质谱对其通过电子轰击产生的离解电离进行了研究。通过大气压辉光（APG）放电合成等离子体聚合的HMDSO薄膜已被报道。在148K的HMDSO晶体是单斜晶体。在P4S10中添加HMDSO可提高其作为硫化剂的效率。
應用
六甲基二硅氧烷可用于：
- 通过干法沉积工艺来制造具有受控疏水性有机硅纳米层的气体扩散层（GDL）。
- 分别使用精氨酸和葡萄糖作为催化剂和还原剂制备涂有二氧化硅的银纳米颗粒。
訊號詞
Danger
危險聲明
防範說明
危險分類
Aquatic Acute 1 - Aquatic Chronic 1 - Flam. Liq. 2
儲存類別代碼
3 - Flammable liquids
水污染物質分類（WGK）
WGK 2
閃點（°F）
21.2 °F - closed cup
閃點（°C）
-6 °C - closed cup
個人防護裝備
Eyeshields, Faceshields, Gloves, type ABEK (EN14387) respirator filter
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