333891

Silane

≥99.998%, electronic grade

• 동의어(들): Silicon tetrahydride
• Linear Formula: SiH₄
• CAS Number: 7803-62-5
• Molecular Weight: 32.12
• EC Number: 232-263-4
• MDL number: MFCD00011228
• UNSPSC 코드: 12352300
• PubChem Substance ID: 24860199

속성

• Grade: electronic grade
• vapor density: 1.1 (vs air)
• 분석: ≥99.998%
• 양식: gas
• 저항도: >1000 Ω-cm
• 불순물: <1 ppm Carbon dioxide (CO₂); <1 ppm Carbon monoxide (CO); <1 ppm Chlorosilanes; <1 ppm THC; <1 ppm Trisilane (Si₃H₈); <1 ppm Water (H₂O); <100 ppm Hydrogen (H₂); <2 ppm Nitrogen (N₂); <2 ppm Siloxanes; <5 ppm Disilane (Si₂H₆)
• bp: −112 °C (lit.)
• mp: −185 °C (lit.)
• 전이 온도: critical temperature −3.4 °C
• density: 1.114 g/mL at 25 °C (lit.)
• SMILES string: [SiH4]

설명

애플리케이션

Silane is used in the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics. Polycrystalline films can be deposited on silicon wafers and glass substrates via remote plasma chemical vapor deposition (RPCVD) using a SiH₄-SiF₂-H₂ gas mixture.[1][2] Silane is used widely as a dopant in the formation of III-IV semiconductor materials.[3]

추천 제품

Stainless steel regulators Z527416 or Z527424 are recommended.

안전성 정보

• 픽토그램: GHS02,GHS04
• 신호어: Danger
• 유해 및 위험 성명서: H220,H280
• 예방조치 성명서: P210 - P377 - P381 - P410 + P403
• Hazard Classifications: Flam. Gas 1A - Press. Gas Compr. Gas
• Storage Class Code: 2A - Gases
• WGK: WGK 1
• Flash Point (°F): Not applicable
• Flash Point (°C): Not applicable
• 개인 보호 장비: Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)