669008

Tetrakis(dimethylamido)titanium(IV)

packaged for use in deposition systems

• Synonym(s): TDMAT, Tetrakis(dimethylamino)titanium(IV)
• Linear Formula: [(CH₃)₂N]₄Ti
• CAS Number: 3275-24-9
• Molecular Weight: 224.17
• EC Number: 221-904-3
• MDL number: MFCD00014861
• UNSPSC Code: 12352103
• PubChem Substance ID: 24885015
• NACRES: NA.23

Properties

• Assay: 99.999% (trace metals analysis)
• form: liquid
• reaction suitability: core: titanium
• bp: 50 °C/0.5 mmHg (lit.)
• density: 0.947 g/mL at 25 °C (lit.)
• SMILES string: CN(C)[Ti](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
• InChI key: MNWRORMXBIWXCI-UHFFFAOYSA-N

Description

General description

Atomic number of base material: 22 Titanium

Application

Precursors Packaged for Depositions Systems

The product is a precursor for the deposition of titanium dioxide thin films by atomic layer deposition with water. Tetrakis(dimethylamido)titanium(IV) (TDMAT) undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

Safety Information

• Pictograms: GHS02,GHS05
• Signal Word: Danger
• Hazard Statements: H225,H260,H314
• Precautionary Statements: P210 - P223 - P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• Hazard Classifications: Flam. Liq. 2 - Skin Corr. 1B - Water-react 1
• Supplementary Hazards: EUH014
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point(F): -22.0 °F - closed cup
• Flash Point(C): -30 °C - closed cup
• Personal Protective Equipment: dust mask type N95 (US), Eyeshields, Gloves