725471

Bis(methyl-η⁵−cyclopentadienyl)methoxymethylzirconium

packaged for use in deposition systems

• Sinónimos: ZRCMMM, ZrD-CO₄
• Fórmula lineal: Zr(CH₃C₅H₄)₂CH₃OCH₃
• Peso molecular: 295.53
• Número MDL: MFCD16875687
• Código UNSPSC: 12352103
• ID de la sustancia en PubChem: 329764163
• NACRES: NA.23

Propiedades

• Formulario: liquid
• idoneidad de la reacción: core: zirconium
• color: colorless
• bp: 110 °C/0.5 mmHg (lit.)
• densidad: 1.27 g/mL±0.01 g/mL at 25 °C (lit.)
• cadena SMILES: C[C]1[C][C][C][C]1.C[C]2[C][C][C][C]2.C[Zr]OC
• InChI: 1S/2C6H7.CH3O.CH3.Zr/c2*1-6-4-2-3-5-6;1-2;;/h2*2-5H,1H3;1H3;1H3;/q;;-1;;+1
• Clave InChI: LFGIFPGCOXPKMG-UHFFFAOYSA-N

Descripción

Descripción general

Atomic number of base material: 40 Zirconium

Aplicación

Precursors Packaged for Depositions Systems

Advanced precursor for atomic layer deposition of ZrO₂ thin films. Hafnium and zirconium oxides are leading candidates to replace silicion dioxide as the gate oxide in a variety of semiconductor and energy applications. Excellent properties of HfO₂ and ZrO₂ films make them especially attractive for gate oxide replacement and as potential insulating dielectrics for capacitive elements in memory devices such as DRAM.

Características y beneficios

Compatible with a variety of oxidants in ALD growth processes across a wide temperature range exhibiting self limiting growth up to 400 °C. Precursor volatility and thermal stability properties enable easy materials transport from bubblers into conventional deposition tools.

Envase

Packaged in stainless steel cylinders compatible with conventional deposition systems. Precursors may be used in liquid injection systems as dilute solutions and in combination with a variety of other sources to deposit mixed oxides.

Información de seguridad

• Pictogramas: GHS07
• Palabra de señalización: Warning
• Frases de peligro: H302,H315,H319
• Consejos de prudencia: P305 + P351 + P338
• Clasificaciones de peligro: Acute Tox. 4 Oral - Eye Irrit. 2 - Skin Irrit. 2
• Código de clase de almacenamiento: 10 - Combustible liquids not in Storage Class 3
• Clase de riesgo para el agua (WGK): WGK 3
• Punto de inflamabilidad (°F): 226.4 °F
• Punto de inflamabilidad (°C): 108 °C