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Merck
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文件

463043

Sigma-Aldrich

乙硅烷

electronic grade

别名:

Disilicane, Disilicoethane, Disilicon hexahydride, Silicoethane, Silicon hydride (Si2 H6 )

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About This Item

线性分子式:
Si2H6
CAS号:
1590-87-0
分子量:
62.22
EC號碼:
216-466-5
MDL號碼:
MFCD00054678
分類程式碼代碼:
12352103
PubChem物質ID:
24869889
NACRES:
NA.23

等級

electronic grade

化驗

≥99.998% chemical purity basis

形狀

gas

雜質

≤50 ppm Higher silanes
<0.2 ppm Chlorosilanes
<1 ppm Argon (Ar) + Oxygen (O2)
<1 ppm Carbon dioxide (CO2)
<1 ppm Nitrogen (N2)
<1 ppm THC
<1 ppm Water
<5 ppm Siloxanes

bp

−14.5 °C (lit.)

mp

−132.6 °C (lit.)

轉變溫度

critical temperature 150.9 °C

SMILES 字串

[SiH3][SiH3]

InChI

1S/H6Si2/c1-2/h1-2H3

InChI 密鑰

PZPGRFITIJYNEJ-UHFFFAOYSA-N

相关类别

一般說明

Atomic number of base material: 14 Silicon

應用

外延硅和硅基电介质快速低温沉积的前体。

特點和優勢

通过快速低温化学气相沉积 (LTCVD)，本品可用于无定形硅、外延硅和硅基电介质的沉积。通过分子束外延 (MBE)，与锗的固体原料相结合，还可用于硅锗薄膜的外延生长。外延硅和硅基电介质快速低温沉积的前体。

訊號詞

Danger

危險分類

Acute Tox. 4 Dermal - Eye Irrit. 2 - Flam. Gas 1B - Press. Gas Liquefied gas - Resp. Sens. 1 - Skin Irrit. 2 - STOT SE 3

標靶器官

Respiratory system

儲存類別代碼

2A - Gases

水污染物質分類（WGK）

WGK 3

閃點（°F）

<50.0 °F - closed cup

閃點（°C）

< 10 °C - closed cup

個人防護裝備

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)

分析证书(COA)

输入产品批号来搜索 分析证书(COA) 。批号可以在产品标签上"批“ （Lot或Batch）字后找到。

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