Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

RÉSUMÉ

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATÉRIAUX

Référence du produit

Marque

Description du produit

348791

Sigma-Aldrich

Titanium, foil, thickness 0.127 mm, 99.7% trace metals basis

366994

Sigma-Aldrich

Titanium, powder, <45 μm avg. part. size, 99.98% trace metals basis

595063

Sigma-Aldrich

Titanium nitride, <3 μm

267503

Sigma-Aldrich

Titanium, foil, thickness 0.25 mm, 99.7% trace metals basis

268496

Sigma-Aldrich

Titanium, powder, −100 mesh, 99.7% trace metals basis

268526

Sigma-Aldrich

Titanium, sponge, 1-20 mm, 99.5% trace metals basis

460400

Sigma-Aldrich

Titanium, wire, diam. 0.25 mm, 99.7% trace metals basis

GF16031843

Titanium, mesh, 100x100mm, nominal aperture 0.19mm, wire diameter 0.23mm, 60x60 wires/inch, open area 20%, twill weave

369489

Sigma-Aldrich

Titanium, foil, thickness 2.0 mm, 99.7% trace metals basis

348848

Sigma-Aldrich

Titanium, foil, thickness 0.025 mm, 99.98% trace metals basis

348805

Sigma-Aldrich

Titanium, foil, thickness 0.5 mm, 99.99% trace metals basis

767506

Sigma-Aldrich

Titanium, sputtering target, diam. × thickness 2.00 in. × 0.25 in., 99.995% trace metals basis

GF29374005

Titanium, mesh, 100x100mm, nominal aperture 4.3mm, wire diameter 1.5mm, 4.4x4.4 wires/inch, open area 94%, platinized diamond mesh

460397

Sigma-Aldrich

Titanium, foil, thickness 0.127 mm, ≥99.99% trace metals basis

267481

Sigma-Aldrich

Titanium, foil, thickness 0.25 mm, 99.99% trace metals basis

266035

Sigma-Aldrich

Titanium, wire, diam. 1.0 mm, 99.99% trace metals basis

305812

Sigma-Aldrich

Titanium, 5-10 mm, ≥99.99% trace metals basis (purity exclusive of Na and K content)

348864

Sigma-Aldrich

Titanium, wire, diam. 0.5 mm, 99.99% trace metals basis

267902

Sigma-Aldrich

Titanium, wire, diam. 0.81 mm, 99.7% trace metals basis

GF31127712

Titanium, rod, 10mm, diameter 50mm, 99.99+%

GF14990935

Titanium, tube, 1000mm, outside diameter 10.3mm, inside diameter 8.7mm, wall thickness 0.8mm, annealed, 99.6+%

GF46592949

Titanium, wire, straight, 1000mm, diameter 1.0mm, as drawn, 99.6+%

433667

Sigma-Aldrich

Titanium, evaporation slug, diam. × L 6.3 mm × 6.3 mm, ≥99.99% trace metals basis

GF62977540

Titanium, tube, 200mm, outside diameter 2.03mm, inside diameter 1.63mm, wall thickness 0.2mm, annealed, 99.6+%

GF13900205

Titanium, tube, 100mm, outside diameter 0.51mm, inside diameter 0.35mm, wall thickness 0.08mm, annealed, 99.6+%

GF49264713

Titanium, tube, 200mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

GF86399106

Titanium, tube, 500mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

GF43519945

Titanium, wire reel, 2m, diameter 1.0mm, as drawn, 99.99+%

GF95731960

Titanium, tube, 500mm, outside diameter 3.0mm, inside diameter 1.5mm, wall thickness 0.75mm, annealed, 99.6+%

GF52005596

Titanium, tube, 500mm, outside diameter 9.5mm, inside diameter 8.2mm, wall thickness 0.65mm, annealed, 99.6+%