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Merck

463027

Sigma-Aldrich

Germane

electronic grade, ≥99.997%

Sinónimos:

Germanium tetrahydride, Germanium(4+) hydride, Monogermane, Tetrahydrogermane

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About This Item

Fórmula lineal:
GeH4
Número de CAS:
Peso molecular:
76.67
Número CE:
Número MDL:
Código UNSPSC:
12352300
ID de la sustancia en PubChem:

grado

electronic grade

densidad de vapor

1.53 (−142 °C, vs air)

Ensayo

≥99.997%

Formulario

gas

impurezas

<0.5 ppm Oxygen (O2)
<1 ppm Carbon monoxide + Trigermane (CO+Ge3H8)
<1 ppm THC
<1 ppm Water (H2O)
<2 ppm Carbon dioxide (CO2)
<2 ppm Nitrogen (N2)
<20 ppm Digermane (Ge2H6)
<5 ppm Chlorogermanes
<5 ppm Germoxanes
<50 ppm Hydrogen (H2)

bp

−88.4 °C (lit.)

mp

−165 °C (lit.)

temperatura de transición

critical temperature 35 °C

cadena SMILES

[GeH4]

InChI

1S/GeH4/h1H4

Clave InChI

QUZPNFFHZPRKJD-UHFFFAOYSA-N

Características y beneficios

Germane gas is used in the deposition of epitaxial and amorphous SiGe alloy layers used in the production of high performance devices including photovoltaic cells and integrated circuits (IC). Precursor to germanium-containing thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE). A CVD precursor for germanium carbide semiconducting films.

Productos recomendados

Stainless steel regulators Z527416 or Z527424 are recommended.

Palabra de señalización

Danger

Frases de peligro

Clasificaciones de peligro

Acute Tox. 2 Inhalation - Acute Tox. 4 Oral - Flam. Gas 1A - Press. Gas Compr. Gas

Código de clase de almacenamiento

2A - Gases

Clase de riesgo para el agua (WGK)

WGK 3

Punto de inflamabilidad (°F)

Not applicable

Punto de inflamabilidad (°C)

Not applicable

Equipo de protección personal

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)


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