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Merck

463027

Sigma-Aldrich

German

electronic grade, ≥99.997%

Synonym(e):

Germanium tetrahydride, Germanium(4+) hydride, Monogermane, Tetrahydrogermane

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About This Item

Lineare Formel:
GeH4
CAS-Nummer:
Molekulargewicht:
76.67
EG-Nummer:
MDL-Nummer:
UNSPSC-Code:
12352300
PubChem Substanz-ID:
Preise und Verfügbarkeit sind derzeit nicht verfügbar.

Qualität

electronic grade

Dampfdichte

1.53 (−142 °C, vs air)

Assay

≥99.997%

Form

gas

Verunreinigungen

<0.5 ppm Oxygen (O2)
<1 ppm Carbon monoxide + Trigermane (CO+Ge3H8)
<1 ppm THC
<1 ppm Water (H2O)
<2 ppm Carbon dioxide (CO2)
<2 ppm Nitrogen (N2)
<20 ppm Digermane (Ge2H6)
<5 ppm Chlorogermanes
<5 ppm Germoxanes
<50 ppm Hydrogen (H2)

bp

−88.4 °C (lit.)

mp (Schmelzpunkt)

−165 °C (lit.)

Übergangstemp.

critical temperature 35 °C

SMILES String

[GeH4]

InChI

1S/GeH4/h1H4

InChIKey

QUZPNFFHZPRKJD-UHFFFAOYSA-N

Leistungsmerkmale und Vorteile

Germane gas is used in the deposition of epitaxial and amorphous SiGe alloy layers used in the production of high performance devices including photovoltaic cells and integrated circuits (IC). Precursor to germanium-containing thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE). A CVD precursor for germanium carbide semiconducting films.

Empfohlene Produkte

Stainless steel regulators Z527416 or Z527424 are recommended.

Signalwort

Danger

Gefahreneinstufungen

Acute Tox. 2 Inhalation - Acute Tox. 4 Oral - Flam. Gas 1A - Press. Gas Compr. Gas

Lagerklassenschlüssel

2A - Gases

WGK

WGK 3

Flammpunkt (°F)

Not applicable

Flammpunkt (°C)

Not applicable

Persönliche Schutzausrüstung

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)


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