333891

Silan

≥99.998%, electronic grade

• Synonym(e): Siliziumtetrahydrid
• Lineare Formel: SiH₄
• CAS-Nummer: 7803-62-5
• Molekulargewicht: 32.12
• EG-Nummer: 232-263-4
• MDL-Nummer: MFCD00011228
• UNSPSC-Code: 12352300
• PubChem Substanz-ID: 24860199

Eigenschaften

• Qualität: electronic grade
• Dampfdichte: 1.1 (vs air)
• Assay: ≥99.998%
• Form: gas
• Widerstandsfähigkeit: >1000 Ω-cm
• Verunreinigungen: <1 ppm Carbon dioxide (CO₂); <1 ppm Carbon monoxide (CO); <1 ppm Chlorosilanes; <1 ppm THC; <1 ppm Trisilane (Si₃H₈); <1 ppm Water (H₂O); <100 ppm Hydrogen (H₂); <2 ppm Nitrogen (N₂); <2 ppm Siloxanes; <5 ppm Disilane (Si₂H₆)
• bp: −112 °C (lit.)
• mp (Schmelzpunkt): −185 °C (lit.)
• Übergangstemp.: critical temperature −3.4 °C
• Dichte: 1.114 g/mL at 25 °C (lit.)
• SMILES String: [SiH4]

Beschreibung

Anwendung

Silane is used in the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics. Polycrystalline films can be deposited on silicon wafers and glass substrates via remote plasma chemical vapor deposition (RPCVD) using a SiH₄-SiF₂-H₂ gas mixture. Silane is used widely as a dopant in the formation of III-IV semiconductor materials.

Empfohlene Produkte

Stainless steel regulators Z527416 or Z527424 are recommended.

Sicherheitshinweise

• Piktogramme: GHS02,GHS04
• Signalwort: Danger
• H-Sätze: H220,H280
• P-Sätze: P210 - P377 - P381 - P410 + P403
• Gefahreneinstufungen: Flam. Gas 1A - Press. Gas Compr. Gas
• Lagerklassenschlüssel: 2A - Gases
• WGK: WGK 1
• Flammpunkt (°F): Not applicable
• Flammpunkt (°C): Not applicable
• Persönliche Schutzausrüstung: Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)