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901621

Sigma-Aldrich

Buffered oxide etchant (BOE) 10:1

Synonyme(s) :

BHF, Buffered HF

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1 L
158,00 $

158,00 $

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1 L
158,00 $

About This Item

Code UNSPSC :
12161700
Nomenclature NACRES :
NA.23

158,00 $

Veuillez contacter notre Service Clients pour connaître la disponibilité de ce produit.
Devis pour commande en gros

Forme

liquid

Catégories apparentées

Description générale

Buffered oxide etchant (BOE) is a wet etchant used in microfabrication. Its primary use is in etching thin films of silicon dioxide (SiO2) or silicon nitride (Si3N4). It is a mixture of a buffering agent, such as ammonium fluoride (NH4F), and hydrofluoric acid (HF). Concentrated HF etches silicon dioxide too quickly for good process control and also peels photoresist used in lithographic patterning.

Application

Buffered oxide etchant (BOE) 10:1 can be used in the etching of titanium carbide, which can be used in microelectromechanical systems (MEMS).[1] It can also be used in the etching of spin-on-dopant (SOD) for the development of conductor-insulator-conductor tunneling diodes.[2] It can also be used to enhance the surface of fused quartz devices.[3]

Pictogrammes

Skull and crossbonesCorrosion
GHS06,GHS05

Mention d'avertissement

Danger

Mentions de danger

H301 + H331,H310,H314

Classification des risques

Acute Tox. 2 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 3 Oral - Eye Dam. 1 - Skin Corr. 1B

Code de la classe de stockage

6.1B - Non-combustible acute toxic Cat. 1 and 2 / very toxic hazardous materials

Classe de danger pour l'eau (WGK)

WGK 2

Point d'éclair (°F)

Not applicable

Point d'éclair (°C)

Not applicable

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Certificats d'analyse (COA)

Lot/Batch Number
MKCV9352
MKCW6926
MKCT6710
MKCS8940
MKCQ4119

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Les clients ont également consulté

Slide 1 of 4

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Hydrofluoric acid 48 wt. % in H2O, ≥99.99% trace metals basis

Sigma-Aldrich

339261

Hydrofluoric acid

Nichrome etchant standard

Sigma-Aldrich

651834

Nichrome etchant

Gold etchant, nickel compatible

Sigma-Aldrich

651842

Gold etchant, nickel compatible

Copper etchant

Sigma-Aldrich

667528

Copper etchant

Study on surface roughness improvement of Fused Quartz after thermal and chemical post-processing
2016 IEEE International Symposium on Inertial Sensors and Systems, 31(8), 101-104 (2016)
New process development for planar-type CIC tunneling diodes
Choi K, et al.
IEEE Electron Device Letters, 31(8), 809-811 (2010)
Integration of wear-resistant titanium carbide coatings into MEMS fabrication processes
Radhakrishnan G, et al.
Tribology Letters, 8(2-3), 133-137 (2000)

Questions

1–3 of 3 Questions  

  1. How is shipping temperature determined? And how is it related to the product storage temperature?

    1 answer

    1. Products may be shipped at a different temperature than the recommended long-term storage temperature. If the product quality is sensitive to short-term exposure to conditions other than the recommended long-term storage, it will be shipped on wet or dry-ice. If the product quality is NOT affected by short-term exposure to conditions other than the recommended long-term storage, it will be shipped at ambient temperature. As shipping routes are configured for minimum transit times, shipping at ambient temperature helps control shipping costs for our customers. For more information, please refer to the Storage and Transport Conditions document: https://www.sigmaaldrich.com/deepweb/assets/sigmaaldrich/marketing/global/documents/316/622/storage-transport-conditions-mk.pdf

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  2. How can I determine the shelf life / expiration / retest date of this product?

    1 answer

    1. If this product has an expiration or retest date, it will be shown on the Certificate of Analysis (COA, CofA). If there is no retest or expiration date listed on the product's COA, we do not have suitable stability data to determine a shelf life. For these products, the only date on the COA will be the release date; a retest, expiration, or use-by-date will not be displayed.
      For all products, we recommend handling per defined conditions as printed in our product literature and website product descriptions. We recommend that products should be routinely inspected by customers to ensure they perform as expected.
      For products without retest or expiration dates, our standard warranty of 1 year from the date of shipment is applicable.
      For more information, please refer to the Product Dating Information document: https://www.sigmaaldrich.com/deepweb/assets/sigmaaldrich/marketing/global/documents/449/386/product-dating-information-mk.pdf

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  3. I’m considering using nitrogen pressure to dispense Buffered Oxide Etch from your containers. The pressure I plan to use is approximately 2 ATM (1 ATM above atmospheric pressure). Can you confirm if the bottles are rated to safely handle this pressure?

    1 answer

    1. The empty bottle is tested to withstand at least 36 psi, but it is not tested once the bottle contains the product. It is not typical to pressure-transfer from one of these HDPE bottles. The product should be transferred into a secondary container from which it is suitable for pressure transfer.

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