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760404

Tantalum(V) ethoxide

packaged for use in deposition systems

Synonym(s):

PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide

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About This Item

Linear Formula:
Ta(OC2H5)5
CAS Number:
6074-84-6
Molecular Weight:
406.25
Beilstein/REAXYS Number:
3678999
EC Number:
228-010-2
MDL number:
MFCD00049785
UNSPSC Code:
12352103
PubChem Substance ID:
329766860
NACRES:
NA.23

form

liquid

refractive index

n20/D 1.487 (lit.)

bp

155 °C/0.01 mmHg (lit.)

mp

21 °C (lit.)

density

1.566 g/mL at 25 °C (lit.)

SMILES string

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5

InChI key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

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Application

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

pictograms

Flame
GHS02

signalword

Warning

hcodes

H226

Hazard Classifications

Flam. Liq. 3

Storage Class

3 - Flammable liquids

wgk_germany

WGK 1

flash_point_f

84.2 °F - closed cup

flash_point_c

29 °C - closed cup

Certificates of Analysis (COA)

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