759554

Zirconium(IV) tert-butoxide

packaged for use in deposition systems

• Synonym(s): Tetra-tert-butoxyzirconium, Tetra-tert-butyl zirconate, ZTB, Zirconium tert-butanolate
• Linear Formula: Zr[OC(CH₃)₃]₄
• CAS Number: 2081-12-1
• Molecular Weight: 383.68
• Beilstein: 3681870
• MDL number: MFCD00075085
• UNSPSC Code: 12352103
• PubChem Substance ID: 329766792
• NACRES: NA.23

Properties

• form: liquid
• reaction suitability: core: zirconium
• refractive index: n20/D 1.424 (lit.)
• bp: 81 °C/3 mmHg (lit.)
• density: 0.985 g/mL at 25 °C (lit.)
• SMILES string: CC(C)(C)O[Zr](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C
• InChI: 1S/4C4H9O.Zr/c4*1-4(2,3)5;/h4*1-3H3;/q4*-1;+4
• InChI key: BGGIUGXMWNKMCP-UHFFFAOYSA-N

Description

Application

Zirconium tert-butoxide (ZTB) precursor is used to deposit thin films of Zirconia and other zirconium containing films by atomic layer deposition and chemical vapor deposition methods. Zirconium oxide thin films can also be grown at low temperatures, ranging from 150°C to 300°C, by the presence of moisture along with ZTB or by UV-enhanced atomic layer deposition (UV-ALD) process.

Safety Information

• Pictograms: GHS07
• Signal Word: Warning
• Hazard Statements: H315,H319,H335
• Precautionary Statements: P261 - P264 - P271 - P280 - P302 + P352 - P305 + P351 + P338
• Hazard Classifications: Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3
• Target Organs: Respiratory system
• Storage Class Code: 10 - Combustible liquids
• WGK: WGK 3
• Flash Point(F): 183.2 °F - closed cup
• Flash Point(C): 84 °C - closed cup