760293

2,4,6,8-Tetramethylcyclotetrasiloxane

packaged for use in deposition systems

• Sinónimos: 1,3,5,7-Cyclotetra(methylsiloxane), 1,3,5,7-Tetramethylcyclotetrasiloxane, TMCTS
• Fórmula lineal: (HSiCH₃O)₄
• Número de CAS: 2370-88-9
• Peso molecular: 240.51
• Beilstein/REAXYS Number: 1775282
• EC Number: 219-137-4
• MDL number: MFCD00039567
• UNSPSC Code: 12352103
• PubChem Substance ID: 329766852
• NACRES: NA.23

Propiedades

• grade: deposition grade
• assay: ≥99.5% (GC); ≥99.999% (trace metals analysis)
• form: liquid
• refractive index: n20/D 1.387 (lit.)
• bp: 134 °C (lit.)
• mp: −69 °C (lit.)
• density: 0.986 g/mL at 25 °C (lit.)
• Storage temp.: 2-8°C
• SMILES string: C[SiH]1O[SiH](C)O[SiH](C)O[SiH](C)O1
• InChI: 1S/C4H16O4Si4/c1-9-5-10(2)7-12(4)8-11(3)6-9/h9-12H,1-4H3
• Inchi Key: BQYPERTZJDZBIR-UHFFFAOYSA-N

Descripción

Application

2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications

Features and Benefits

Precursor for gate dielectrics in thin-film transistors (TFT), and is a component of photochemically formed SiO_X monolayers on TiO.

Información de seguridad

• pictograms: GHS02
• signalword: Warning
• hcodes: H226
• Hazard Classifications: Flam. Liq. 3
• Storage Class: 3 - Flammable liquids
• wgk_germany: WGK 3
• flash_point_f: 75.2 °F - closed cup
• flash_point_c: 24 °C - closed cup