- Initiated chemical vapor deposition-based method for patterning polymer and metal microstructures on curved substrates.
Initiated chemical vapor deposition-based method for patterning polymer and metal microstructures on curved substrates.
Advanced materials (Deerfield Beach, Fla.) (2012-09-27)
Christy D Petruczok, Karen K Gleason
PMID23011917
摘要
A simple, efficient, and scalable method for patterning microstructures on curved substrates is demonstrated. Initiated chemical vapor deposition is used to synthesize a thin film that crosslinks upon UV exposure. Polymeric features are defined on glass rods with high curvature and used as masks for metal patterning. Additionally, vapor-deposited polymer layers are selectively patterned to produce bifunctional surfaces.