725528

Tetrakis(ethylmethylamido)zirconium(IV)

packaged for use in deposition systems

• Synonym(s): TEMAZ, Tetrakis(ethylmethylamino)zirconium(IV)
• Linear Formula: Zr(NCH₃C₂H₅)₄
• CAS Number: 175923-04-3
• Molecular Weight: 323.63
• MDL number: MFCD03427131
• UNSPSC Code: 12352103
• PubChem Substance ID: 329764166
• NACRES: NA.23

Properties

• form: liquid
• reaction suitability: core: zirconium; reagent type: catalyst
• bp: 81 °C/0.1 mmHg (lit.)
• density: 1.049 g/mL at 25 °C (lit.)
• SMILES string: CCN(C)[Zr](N(C)CC)(N(C)CC)N(C)CC
• InChI: 1S/4C3H8N.Zr/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4
• InChI key: SRLSISLWUNZOOB-UHFFFAOYSA-N

Description

General description

Atomic number of base material: 40 Zirconium

Application

Precursors Packaged for Depositions Systems

Safety Information

• Pictograms: GHS02,GHS07
• Signal Word: Danger
• Hazard Statements: H225,H261,H315,H319,H335
• Precautionary Statements: P210 - P231 + P232 - P302 + P352 - P305 + P351 + P338
• Hazard Classifications: Eye Irrit. 2 - Flam. Liq. 2 - Skin Irrit. 2 - STOT SE 3 - Water-react 2
• Target Organs: Respiratory system
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point(F): 50.0 °F - closed cup
• Flash Point(C): 10 °C - closed cup