401471
Palladium(II) hexafluoroacetylacetonate
Synonym(s):
Pd(II) hexafluoroacetylacetonate
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About This Item
Linear Formula:
Pd(C5HF6O2)2
CAS Number:
Molecular Weight:
520.52
EC Number:
MDL number:
UNSPSC Code:
12352103
PubChem Substance ID:
NACRES:
NA.23
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Quality Level
form
powder or crystals
reaction suitability
core: palladium
reagent type: catalyst
SMILES string
FC(F)(F)C(=O)\C=C(/O[Pd]O\C(=C/C(=O)C(F)(F)F)C(F)(F)F)C(F)(F)F
InChI
1S/2C5H2F6O2.Pd/c2*6-4(7,8)2(12)1-3(13)5(9,10)11;/h2*1,12H;/q;;+2/p-2/b2*2-1-;
InChI key
OVIDFVVPPRGPGR-PAMPIZDHSA-L
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Application
Used in a redox transmetalation reaction to enhance CVD alloying technology for copper. Also used in the simultaneous etching of copper and deposition of palladium for applications in ultra large-scale integrated devices.
Signal Word
Warning
Hazard Statements
Precautionary Statements
Hazard Classifications
Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3
Target Organs
Respiratory system
Storage Class Code
11 - Combustible Solids
WGK
WGK 3
Personal Protective Equipment
dust mask type N95 (US), Eyeshields, Gloves
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Lin. W. et al.
Journal of the American Chemical Society, 118, 5977-5977 (1996)
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