Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

ABSTRACT

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATERIALS

Product Number

Brand

Product Description

595063

Sigma-Aldrich

Titanium nitride, <3 μm

GF25880485

Titanium, tube, 100mm, outside diameter 6.35mm, inside diameter 5.53mm, wall thickness 0.41mm, annealed, 99.6+%

GF32270015

Titanium, tube, 200mm, outside diameter 2.03mm, inside diameter 1.55mm, wall thickness 0.24mm, annealed, 99.6+%

GF23860144

Titanium, tube, 500mm, outside diameter 6.35mm, inside diameter 4.57mm, wall thickness 0.89mm, annealed, 99.6+%

GF05925281

Titanium, microfoil, disks, 10mm, thinness 0.1μm, specific density 42.8μg/cm², permanent mylar 3.5μm support, 99.6+%

GF54978249

Titanium, rod, 200mm, diameter 4mm, annealed, 99.6+%

GF32919925

Titanium, tube, 500mm, outside diameter 10.3mm, inside diameter 8.7mm, wall thickness 0.8mm, annealed, 99.6+%

GF64061760

Titanium, rod, 1000mm, diameter 16mm, annealed, 99.6+%

GF46592949

Titanium, wire, straight, 1000mm, diameter 1.0mm, as drawn, 99.6+%

GF04909653

Titanium, rod, 50mm, diameter 20mm, as drawn, 99.99+%

GF43519945

Titanium, wire reel, 2m, diameter 1.0mm, as drawn, 99.99+%

GF34996685

Titanium, wire reel, 200m, diameter 0.125mm, annealed, 99.6+%

GF82495198

Titanium, rod, 200mm, diameter 9.5mm, annealed, 99.99+%

GF04311638

Titanium, rod, 100mm, diameter 6mm, annealed, 99.6+%

GF08595119

Titanium, wire reel, 100m, diameter 1.0mm, annealed, 99.6+%

GF54883581

Titanium, rod, 1000mm, diameter 3.0mm, annealed, 99.6+%

GF49264713

Titanium, tube, 200mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

GF94150593

Titanium, wire reel, 10m, diameter 1.5mm, as drawn, 99.6+%

GF76772391

Titanium, rod, 100mm, diameter 10mm, annealed, 99.6+%

GF62977540

Titanium, tube, 200mm, outside diameter 2.03mm, inside diameter 1.63mm, wall thickness 0.2mm, annealed, 99.6+%

GF82635138

Titanium, tube, 500mm, outside diameter 6.35mm, inside diameter 5.53mm, wall thickness 0.41mm, annealed, 99.6+%

GF52551222

Titanium, microfoil, disks, 10mm, thinness 0.25μm, specific density 112.6μg/cm², permanent mylar 3.5μm support, 99.6+%

GF32801251

Titanium, tube, 1000mm, outside diameter 1.05mm, inside diameter 0.75mm, wall thickness 0.15mm, annealed, 99.6+%

GF72193114

Titanium, tube, 500mm, outside diameter 2.03mm, inside diameter 1.63mm, wall thickness 0.2mm, annealed, 99.6+%

GF23916618

Titanium, microfoil, disks, 25mm, thinness 0.5μm, specific density 225.4μg/cm², permanent mylar 3.5μm support, 99.6+%

GF11909932

Titanium, tube, 100mm, outside diameter 4.25mm, inside diameter 3.75mm, wall thickness 0.25mm, annealed, 99.6+%

GF90688449

Titanium, wire reel, 5m, diameter 0.75mm, as drawn, 99.6+%

GF36425707

Titanium, wire reel, 200m, diameter 0.20mm, annealed, 99.6+%

GF50171318

Titanium, rod, 25mm, diameter 16mm, as drawn, 99.99+%

GF51463357

Titanium, tube, 200mm, outside diameter 10.3mm, inside diameter 8.7mm, wall thickness 0.8mm, annealed, 99.6+%