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40267

Sigma-Aldrich

Hydrogen peroxide solution

≥30%

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About This Item

Empirical Formula (Hill Notation):
H2O2
CAS Number:
7722-84-1
Molecular Weight:
34.01
Beilstein:
3587191
MDL number:
MFCD00011333
UNSPSC Code:
12352300
PubChem Substance ID:
57649957

vapor pressure

23.3 mmHg ( 30 °C)

Assay

≥30%

CofA

specification on request

reaction suitability

reagent type: oxidant

density

1.110 g/cm3

storage temp.

2-8°C

SMILES string

OO

InChI

1S/H2O2/c1-2/h1-2H

InChI key

MHAJPDPJQMAIIY-UHFFFAOYSA-N

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General description

Hydrogen peroxide is a strong oxidizer. It may be produced industrially by anthraquinone oxidation. it is used in semiconductor industry essentially for cleaning silicon wafers, removal of photoresists and to etch metallic copper on printed circuit boards. Ultrapurification of hydrogen peroxide by reverse osmosis has been reported in detail.

Application

Semiconductor grade hydrogen peroxide was used to etch TiN 2 and GaAs structures.

Pictograms

Corrosion
GHS05

Signal Word

Danger

Hazard Statements

H318,H412

Hazard Classifications

Aquatic Chronic 3 - Eye Dam. 1

Storage Class Code

5.1B - Oxidizing hazardous materials

WGK

WGK 1

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

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Certificates of Analysis (COA)

Lot/Batch Number
SZBE2800V
SZBD1480V
SZBB2940V
SZBB2940
SZBB2210V

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TiN metal hardmask etch residue removal on advanced porous low-k and Cu device with corner rounding scheme
Cui H, et al.
Solid State Phenomena, 187 (2012)
Ultrapurification of hydrogen peroxide solution from ionic metals impurities to semiconductor grade by reverse osmosis.
Abejon R, et al.
Separation and Purification Technology, 76(1), 44-51 (2010)
Localized GaAs etching with acidic hydrogen peroxide solutions
Shaw DW, et al.
Journal of the Electrochemical Society, 128(4), 874-880 (1981)
Jose M Campos-Martin et al.
Angewandte Chemie (International ed. in English), 45(42), 6962-6984 (2006-10-14)
Hydrogen peroxide (H2O2) is widely used in almost all industrial areas, particularly in the chemical industry and environmental protection. The only degradation product of its use is water, and thus it has played a large role in environmentally friendly methods
Shoichi Iriguchi et al.
Blood, 125(2), 370-382 (2014-10-29)
Although overexpression of T-bet, a master transcription factor in type-1 helper T lymphocytes, has been reported in several hematologic and immune diseases, its role in their pathogenesis is not fully understood. In the present study, we used transgenic model mice
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