Skip to Content
Merck
All Photos(1)

Documents

379212

Sigma-Aldrich

Hexamethyldisilazane

ReagentPlus®, 99.9%

Synonym(s):

1,1,1,3,3,3-Hexamethyldisilazane, HMDS

Sign Into View Organizational & Contract Pricing


About This Item

Linear Formula:
(CH3)3SiNHSi(CH3)3
CAS Number:
Molecular Weight:
161.39
Beilstein:
635752
EC Number:
MDL number:
UNSPSC Code:
12352103
PubChem Substance ID:
NACRES:
NA.23

product line

ReagentPlus®

Assay

99.9%

form

liquid

refractive index

n20/D 1.407 (lit.)

bp

125 °C (lit.)

SMILES string

C[Si](C)(C)N[Si](C)(C)C

InChI

1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3

InChI key

FFUAGWLWBBFQJT-UHFFFAOYSA-N

Looking for similar products? Visit Product Comparison Guide

General description

Hexamethyldisilazane (HDMS) is an organoslicon compound. HDMS is a colorless liquid used as a reagent and precursor in organic synthesis and organometallic chemistry. It is also used as a sol-gel precursor to fabricate thin films for semiconductor devices.

Application

Hexamethyldisilazane can be used:
  • As a precursor to fabricate multilayer quantum dot light-emitting diodes.
  • To modify dielectric surfaces of organic thin film transistors.
  • To fabricate superhydrophobic coatings on epoxy resins.
  • For the silylation of alcohols and phenols.

Legal Information

ReagentPlus is a registered trademark of Merck KGaA, Darmstadt, Germany

Pictograms

FlameSkull and crossbones

Signal Word

Danger

Hazard Classifications

Acute Tox. 3 Dermal - Acute Tox. 4 Inhalation - Acute Tox. 4 Oral - Aquatic Chronic 3 - Flam. Liq. 2

Storage Class Code

3 - Flammable liquids

WGK

WGK 2

Flash Point(F)

52.5 °F - closed cup

Flash Point(C)

11.4 °C - closed cup

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Certificates of Analysis (COA)

Search for Certificates of Analysis (COA) by entering the products Lot/Batch Number. Lot and Batch Numbers can be found on a product’s label following the words ‘Lot’ or ‘Batch’.

Already Own This Product?

Find documentation for the products that you have recently purchased in the Document Library.

Visit the Document Library

A simple and efficient room temperature silylation of diverse functional groups with hexamethyldisilazane using CeO2 nanoparticles as solid catalysts
Nagaraj Anbu, et al
Molecular Catalysis, 474, 110357-110357 (2019)
G Chiavari et al.
Journal of chromatography. A, 922(1-2), 235-241 (2001-08-07)
Alpha-amino acids were pyrolysed at 600 degrees C in the presence of hexamethyldisilazane (HMDS) and the formed volatile products were analysed on line by gas chromatography-mass spectrometry (GC-MS). Glycine, alanine, valine, leucine, isoleucine, norleucine, methionine, phenylalanine yielded principally the trimethylsilyl
Hexamethyldisilazane-mediated full-solution-processed inverted quantum dot-light-emitting diodes
Yan Fu, et al.
Journal of Materials Chemistry, 5, 522-526 (2017)
D F Bray et al.
Microscopy research and technique, 26(6), 489-495 (1993-12-15)
Three different drying methods, critical-point drying (CPD), Peldri II, and hexamethyldisilazane (HMDS), were compared using representative animal (rat kidney, trachea, duodenum, lung, and red blood cells) and plant (leaves from ten species of monocotyledons and dicotyledons) specimens. All three drying
Ar/HMDS Plasma Jet as a Tool for Superhydrophobic Coatings on Epoxy Resin
Jingang Wang, et al.
Nanotechnology, IEEE Transactions, 50, 1867-1874 (2022)

Articles

atomic layer deposition (ALD), microelectronics, Mo:Al2O3 films, nanocomposite coating, photovoltaics, semiconductor devices, W:Al2O3 films, composite films, layer-by-layer

Spintronics offer breakthroughs over conventional memory/logic devices with lower power, leakage, saturation, and complexity.

Spintronics offer breakthroughs over conventional memory/logic devices with lower power, leakage, saturation, and complexity.

Spintronics offer breakthroughs over conventional memory/logic devices with lower power, leakage, saturation, and complexity.

See All

Our team of scientists has experience in all areas of research including Life Science, Material Science, Chemical Synthesis, Chromatography, Analytical and many others.

Contact Technical Service