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667501

Sigma-Aldrich

Tantalum nitride etchant

Synonym(s):

Tantalum nitride etch

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About This Item

MDL number:
MFCD08705363
UNSPSC Code:
12161700
NACRES:
NA.23
Pricing and availability is not currently available.

General description

Tantalum nitride etchant is a high purity etchant systems for precise, clean etching of tantalum, tantalum nitride, and tantalum oxide thin films and resists in electronics applications.

Application

Etchant solution for precise, clean etching of tantalum, tantalum nitride, and tantalum oxide thin films and resists in electronics applications

Features and Benefits

Etch rate 70-80 Å / sec @ 25 C. Use with gold positive or negative photoresist. Rinse with Deionized water.

Preparation Note

  • Etch times vary depending on material type (Ta, TaN, or Ta2O5) and purity.
  • Dilute with water or lower the temperature to achieve a lower etch rate. Adding 1 part water to 2 parts etchant or reducing the temperature 10 °C will approximately reduce the etch rate by 50%.
  • Parts to be etched should be placed in etchant solution with mild to moderate mechanical agitation.
  • Tantalum Etchants contain hydrofluoric acid and will attack silicon oxides, titanium, nickel, aluminum, and chromium.
  • Gold would be the ideal etch stop. You might also succeed with tungsten
  • Rinse with Deionized water.

Pictograms

Skull and crossbonesCorrosion
GHS06,GHS05

Signal Word

Danger

Hazard Classifications

Acute Tox. 1 Dermal - Acute Tox. 2 Oral - Acute Tox. 3 Inhalation - Eye Dam. 1 - Met. Corr. 1 - Skin Corr. 1A

Supplementary Hazards

EUH071

Storage Class Code

6.1B - Non-combustible acute toxic Cat. 1 and 2 / very toxic hazardous materials

WGK

WGK 2

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Choose from one of the most recent versions:

Certificates of Analysis (COA)

Lot/Batch Number
MKCQ6382
MKCC1405
MKBR1199V
36898MJ
11703BE

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