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463019

Sigma-Aldrich

Silicon tetrafluoride

electronic grade, ≥99.99%

Synonym(s):

Silicon(IV) fluoride

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About This Item

Linear Formula:
SiF4
CAS Number:
7783-61-1
Molecular Weight:
104.08
EC Number:
232-015-5
MDL number:
MFCD00040533
UNSPSC Code:
12352300
PubChem Substance ID:
24869885
NACRES:
NA.23

grade

electronic grade

Assay

≥99.99%

form

liquid

reaction suitability

core: silicon

impurities

<0.5 ppm Carbon monoxide (CO)
<1 ppm Argon + oxygen (Ar + O2)
<1 ppm Carbon dioxide (CO2)
<10 ppm Methane (CH4)
<3 ppm Nitrogen (N2)
<50 ppm Hydrogen fluoride (HF)

bp

−86 °C (lit.)

mp

−90 °C (lit.)

transition temp

critical temperature −14.2 °C

density

3.57 g/mL at 25 °C (lit.)

SMILES string

F[Si](F)(F)F

InChI

1S/F4Si/c1-5(2,3)4

InChI key

ABTOQLMXBSRXSM-UHFFFAOYSA-N

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Application

Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF4-SiH4-H2 have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD). Such fluorinated thin films show visible photoluminescence (PL) at room temperature.

Packaging

Supplied in a carbon steel lecture bottle with a CGA180M/CGA110F needle valve installed.

Compatible with the following:
  • Aldrich® lecture-bottle station systems
  • Aldrich® lecture-bottle gas regulators

Other Notes

See Technical Information Bulletin AL-151 Gas Regulators: Selection, Installation, and Operation

Legal Information

Aldrich is a registered trademark of Sigma-Aldrich Co. LLC

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Signal Word

Danger

Hazard Statements

H280,H314,H330

Hazard Classifications

Acute Tox. 2 Inhalation - Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1A

Supplementary Hazards

EUH014,EUH029

Storage Class Code

2A - Gases

WGK

WGK 3

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Certificates of Analysis (COA)

Search for Certificates of Analysis (COA) by entering the products Lot/Batch Number. Lot and Batch Numbers can be found on a product’s label following the words ‘Lot’ or ‘Batch’.

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[Experimental study of toxic properties of silicon tetrafluoride].
G I Rumiantsev et al.
Gigiena i sanitariia, (5)(5), 31-33 (1991-05-01)
Kathryn George et al.
Dalton transactions (Cambridge, England : 2003), 40(7), 1584-1593 (2011-01-18)
The hypervalent adducts of SiF(4), trans-[SiF(4)(R(3)PO)(2)] (R = Me, Et or Ph), cis-[SiF(4){R(2)P(O)CH(2)P(O)R(2)}] (R = Me or Ph), cis-[SiF(4)(pyNO)(2)] and trans-[SiF(4)(DMSO)(2)] have been prepared from SiF(4) and the ligands in anhydrous CH(2)Cl(2), and characterised by microanalysis, IR and VT multinuclear
Diffusion and Defect Data, Solid State Data, Part B, 51-52, 149-149 (1996)
Cicala, G.
Journal of Applied Physiology, 80, 6564-6564 (1996)
Shou-Nan Li et al.
AIHA journal : a journal for the science of occupational and environmental health and safety, 64(3), 408-414 (2003-06-18)
A mobile extractive Fourier transform infrared (FTIR) spectrometer was successfully used to locate, identify, and quantify the "odor" sources inside the cleanroom of a semiconductor manufacturing plant. It was found that ozone (O(3)) gas with a peak concentration of 120
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