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Grade
electronic grade
분석
≥99.99%
형태
liquid
반응 적합성
core: silicon
불순물
<0.5 ppm Carbon monoxide (CO)
<1 ppm Argon + oxygen (Ar + O2)
<1 ppm Carbon dioxide (CO2)
<10 ppm Methane (CH4)
<3 ppm Nitrogen (N2)
<50 ppm Hydrogen fluoride (HF)
bp
−86 °C (lit.)
mp
−90 °C (lit.)
전이 온도
critical temperature −14.2 °C
density
3.57 g/mL at 25 °C (lit.)
SMILES string
F[Si](F)(F)F
InChI
1S/F4Si/c1-5(2,3)4
InChI key
ABTOQLMXBSRXSM-UHFFFAOYSA-N
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애플리케이션
Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF4-SiH4-H2 have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD). Such fluorinated thin films show visible photoluminescence (PL) at room temperature.
포장
Supplied in a carbon steel lecture bottle with a CGA180M/CGA110F needle valve installed.
Compatible with the following:
Compatible with the following:
- Aldrich® lecture-bottle station systems
- Aldrich® lecture-bottle gas regulators
기타 정보
See Technical Information Bulletin AL-151 Gas Regulators: Selection, Installation, and Operation
법적 정보
Aldrich is a registered trademark of Sigma-Aldrich Co. LLC
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유해 및 위험 성명서
Hazard Classifications
Acute Tox. 2 Inhalation - Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1A
보충제 위험성
Storage Class Code
2A - Gases
WGK
WGK 3
Flash Point (°F)
Not applicable
Flash Point (°C)
Not applicable
개인 보호 장비
Faceshields, Gloves, Goggles
시험 성적서(COA)
제품의 로트/배치 번호를 입력하여 시험 성적서(COA)을 검색하십시오. 로트 및 배치 번호는 제품 라벨에 있는 ‘로트’ 또는 ‘배치’라는 용어 뒤에서 찾을 수 있습니다.
[Experimental study of toxic properties of silicon tetrafluoride].
G I Rumiantsev et al.
Gigiena i sanitariia, (5)(5), 31-33 (1991-05-01)
Kathryn George et al.
Dalton transactions (Cambridge, England : 2003), 40(7), 1584-1593 (2011-01-18)
The hypervalent adducts of SiF(4), trans-[SiF(4)(R(3)PO)(2)] (R = Me, Et or Ph), cis-[SiF(4){R(2)P(O)CH(2)P(O)R(2)}] (R = Me or Ph), cis-[SiF(4)(pyNO)(2)] and trans-[SiF(4)(DMSO)(2)] have been prepared from SiF(4) and the ligands in anhydrous CH(2)Cl(2), and characterised by microanalysis, IR and VT multinuclear
Diffusion and Defect Data, Solid State Data, Part B, 51-52, 149-149 (1996)
Cicala, G.
Journal of Applied Physiology, 80, 6564-6564 (1996)
Shou-Nan Li et al.
AIHA journal : a journal for the science of occupational and environmental health and safety, 64(3), 408-414 (2003-06-18)
A mobile extractive Fourier transform infrared (FTIR) spectrometer was successfully used to locate, identify, and quantify the "odor" sources inside the cleanroom of a semiconductor manufacturing plant. It was found that ozone (O(3)) gas with a peak concentration of 120
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