205184

Hexachlorodisilane

96%

• 동의어(들): 1,1,1,2,2,2-Hexachlorodisilane, Disilicon hexachloride, HCDS
• Linear Formula: (SiCl₃)₂
• CAS Number: 13465-77-5
• Molecular Weight: 268.89
• EC Number: 236-704-1
• MDL number: MFCD00011599
• UNSPSC 코드: 12352103
• PubChem Substance ID: 24852311
• NACRES: NA.23

속성

• 분석: 96%
• 형태: liquid
• refractive index: n20/D 1.475 (lit.)
• bp: 144-145.5 °C (lit.)
• density: 1.562 g/mL at 25 °C (lit.)
• SMILES string: Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl
• InChI: 1S/Cl6Si2/c1-7(2,3)8(4,5)6
• InChI key: LXEXBJXDGVGRAR-UHFFFAOYSA-N

설명

일반 설명

Hexachlorodisilane (HCDS) is a chlorosilane used as a precursor for producing disilanes. It is a dioxidizer that is used in the production of silicon films and silicon nitride based films.

애플리케이션

HCDS can be used in the fabrication of silica aerogels by chemical vapor deposition (CVD), which can be potentially used as encapsulating agents and thermal insulators. It can also be used to synthesize 1,1,1,2,2,2-hexaamino-disilanes using CVD, which forms silicon-based films for microelectronic-based applications.

HCDS may be used as a reducing agent. It may be combined with ammonia to form silicon nitride by chemical vapor deposition(CVD) technique.

안전성 정보

• 픽토그램: GHS05
• 신호어: Danger
• 유해 및 위험 성명서: H314
• 예방조치 성명서: P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338 - P363 - P405
• Hazard Classifications: Skin Corr. 1B
• 보충제 위험성: EUH014
• Storage Class Code: 8A - Combustible corrosive hazardous materials
• WGK: WGK 3
• Flash Point (°F): Not applicable
• Flash Point (°C): Not applicable
• 개인 보호 장비: Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter