901482
Hexamethyldisilazane
20% solution in xylene
Synonym(s):
HMDS
About This Item
Recommended Products
form
liquid
InChI
1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
InChI key
FFUAGWLWBBFQJT-UHFFFAOYSA-N
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General description
The effectiveness of HMDS on adhesion is correlated with the reactivity of this compound with surface hydroxyl groups to form a new siloxane end product, i.e. Si-O-Si(CH3)3. This newly formed termination on the substrate renders the surface more hydrophobic in character and leads to greater wettability by photoresist. The latter condition is a crucial factor in good bonding. As a result of these altered characteristics due to the surface chemistry, the treated silicon surfaces become highly compatible with both negative and positive photoresists.
Application
Features and Benefits
- Ready-to-use preparations for surface treatment of silicon.
- Promotes photoresist adhesion on silicon and SiO2 films.
- Prevents lift-off at edges of photoresist and reduces undercutting.
- Ensures full-line resolution.
- Improves yields of MOS and integrated silicon devices.
Signal Word
Danger
Hazard Statements
Precautionary Statements
Hazard Classifications
Acute Tox. 3 Dermal - Acute Tox. 4 Inhalation - Aquatic Chronic 3 - Asp. Tox. 1 - Eye Irrit. 2 - Flam. Liq. 3 - Skin Irrit. 2 - STOT RE 2 - STOT SE 3
Target Organs
hearing organs, Respiratory system
Storage Class Code
3 - Flammable liquids
WGK
WGK 2
Flash Point(F)
76.1 °F
Flash Point(C)
24.5 °C
Regulatory Listings
Regulatory Listings are mainly provided for chemical products. Only limited information can be provided here for non-chemical products. No entry means none of the components are listed. It is the user’s obligation to ensure the safe and legal use of the product.
PRTR
Class I Designated Chemical Substances
FSL
Group 4: Flammable liquids
Type 2 petroleums
Hazardous rank III
Water insoluble liquid
ISHL Indicated Name
Substances Subject to be Indicated Names
ISHL Notified Names
Substances Subject to be Notified Names
JAN Code
901482-VAR:
901482-1L:
901482-BULK:
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