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333891

Sigma-Aldrich

Silane

≥99.998%, electronic grade

Synonym(s):

Silicon tetrahydride

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About This Item

Linear Formula:
SiH4
CAS Number:
7803-62-5
Molecular Weight:
32.12
EC Number:
232-263-4
MDL number:
MFCD00011228
UNSPSC Code:
12352300
PubChem Substance ID:
24860199

grade

electronic grade

vapor density

1.1 (vs air)

Assay

≥99.998%

form

gas

resistivity

>1000 Ω-cm

impurities

<1 ppm Carbon dioxide (CO2)
<1 ppm Carbon monoxide (CO)
<1 ppm Chlorosilanes
<1 ppm THC
<1 ppm Trisilane (Si3H8)
<1 ppm Water (H2O)
<100 ppm Hydrogen (H2)
<2 ppm Nitrogen (N2)
<2 ppm Siloxanes
<5 ppm Disilane (Si2H6)

bp

−112 °C (lit.)

mp

−185 °C (lit.)

transition temp

critical temperature −3.4 °C

density

1.114 g/mL at 25 °C (lit.)

SMILES string

[SiH4]

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Application

Silane is used in the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics. Polycrystalline films can be deposited on silicon wafers and glass substrates via remote plasma chemical vapor deposition (RPCVD) using a SiH4-SiF2-H2 gas mixture. Silane is used widely as a dopant in the formation of III-IV semiconductor materials.

Recommended products

Stainless steel regulators Z527416 or Z527424 are recommended.

Pictograms

FlameGas cylinder
GHS02,GHS04

Signal Word

Danger

Hazard Statements

H220,H280

Precautionary Statements

P210 - P377 - P381 - P410 + P403

Hazard Classifications

Flam. Gas 1A - Press. Gas Compr. Gas

Storage Class Code

2A - Gases

WGK

WGK 1

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Regulatory Listings

Regulatory Listings are mainly provided for chemical products. Only limited information can be provided here for non-chemical products. No entry means none of the components are listed. It is the user’s obligation to ensure the safe and legal use of the product.

ISHL Indicated Name

Substances Subject to be Indicated Names

ISHL Notified Names

Substances Subject to be Notified Names

JAN Code

333891-17G:
333891-BULK:
333891-VAR:
333891-50G:
333891-10G:
333891-50G-PW:

Certificates of Analysis (COA)

Search for Certificates of Analysis (COA) by entering the products Lot/Batch Number. Lot and Batch Numbers can be found on a product’s label following the words ‘Lot’ or ‘Batch’.

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Hu, C. C.
Thin Solid Films, 288, 147-147 (1996)
Structural and electrical properties of low temperature polycrystalline silicon deposited using SiF4?SiH4?H2
Jin Jang
Thin Solid Films, 289, 227-227 (1996)
Quinn, L.J.
Thin Solid Films, 296, 7-7 (1997)

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