This product is packaged for use in deposition systems. The Yield Engineering Systems (YES) CVD (Chemical Vapor Deposition) equipment can precisely control deposition parameters such as the reactant volume, reaction temperature, and deposition time, which are ideal for APTES deposition. Although bulky and expensive, the system makes the deposition process is relatively simple. The oxide surface can be hydroxylated with plasma using the YES system or a piranha solution, beforehand. The APTES is stored in temperature-controlled flasks where it is evaporated and introduced to the deposition chamber, which is kept at 150 °C and a low pressure (0.5-500 Torr). Nitrogen purges have been used before the deposition to dehydrate the surface or after deposition to remove physisorbed molecules. Rather than dehydrate the surface, water vapor can also be introduced to hydrate it, if so desired. The deposition time using a YES system is short compared to other methods. In the literature, YES CVD systems have been used to deposit monolayers of APTES using processes with different steps.
706493
(3-Aminopropyl)triethoxysilane
packaged for use in deposition systems, ≥98%
Synonym(s):
3-Triethoxysilylpropylamine, APTES, APTS
About This Item
Recommended Products
Quality Level
Assay
≥98%
form
liquid
bp
217 °C/760 mmHg (lit.)
density
0.946 g/mL at 25 °C (lit.)
SMILES string
CCO[Si](CCCN)(OCC)OCC
InChI
1S/C9H23NO3Si/c1-4-11-14(12-5-2,13-6-3)9-7-8-10/h4-10H2,1-3H3
InChI key
WYTZZXDRDKSJID-UHFFFAOYSA-N
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General description
Application
Signal Word
Danger
Hazard Statements
Precautionary Statements
Hazard Classifications
Acute Tox. 4 Oral - Eye Dam. 1 - Skin Corr. 1B - Skin Sens. 1
Storage Class Code
8A - Combustible corrosive hazardous materials
WGK
WGK 1
Flash Point(F)
199.4 °F - closed cup
Flash Point(C)
93 °C - closed cup
Personal Protective Equipment
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Hello. I noticed this special packaging of APTES for deposition: 706493-20ML. Can you tell me more? We have a Yield Engineering Systems oven. Is this packaging for that oven?
1 answer-
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What is the Department of Transportation shipping information for this product?
1 answer-
Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product.
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What is the concentration of the (3-Aminopropyl)triethoxysilane, commonly known as APTES?
1 answer-
The (3-Aminopropyl)triethoxysilane, which is a neat liquid, is 4.3 M. This is based on a density of 0.946 g/mL and a molecular weight of 221.37.
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