Each unit of Standard Reference Material (SRM) contains 25 mm × 25 mm × 0.725 mm double-polished (100)-oriented, single-crystal Si specimens with a nominal 50 nm Si0.85Ge0.15 epitaxial layer and 25 nm Si cap. For more information, please refer to the SDS and COA.
This Standard Reference Material (SRM) offers the high-resolution X-ray diffraction (HRXRD) community SI-traceable Si (220) d-spacing in transmission, wafer miscut angle relative to the crystal plane, and the surface-to-Si (004) Bragg angle in reflection for the specified reference wavelength.
Caractéristiques et avantages
Certified values for SRM 2000 are available and can be used to calibrate HRXRD instrumentation. Expiration details, along with instructions for use, are included on the NIST certificate.
Autres remarques
Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Informations légales
NIST is a registered trademark of National Institute of Standards and Technology
SRM is a registered trademark of National Institute of Standards and Technology
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