333891

Silane

≥99.998%, electronic grade

• Synonym(s): Silicon tetrahydride
• Linear Formula: SiH₄
• CAS Number: 7803-62-5
• Molecular Weight: 32.12
• EC Number: 232-263-4
• MDL number: MFCD00011228
• UNSPSC Code: 12352300
• PubChem Substance ID: 24860199

Properties

• grade: electronic grade
• vapor density: 1.1 (vs air)
• Assay: ≥99.998%
• form: gas
• resistivity: >1000 Ω-cm
• impurities: <1 ppm Carbon dioxide (CO₂); <1 ppm Carbon monoxide (CO); <1 ppm Chlorosilanes; <1 ppm THC; <1 ppm Trisilane (Si₃H₈); <1 ppm Water (H₂O); <100 ppm Hydrogen (H₂); <2 ppm Nitrogen (N₂); <2 ppm Siloxanes; <5 ppm Disilane (Si₂H₆)
• bp: −112 °C (lit.)
• mp: −185 °C (lit.)
• transition temp: critical temperature −3.4 °C
• density: 1.114 g/mL at 25 °C (lit.)
• SMILES string: [SiH4]

Description

Application

Silane is used in the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics. Polycrystalline films can be deposited on silicon wafers and glass substrates via remote plasma chemical vapor deposition (RPCVD) using a SiH₄-SiF₂-H₂ gas mixture. Silane is used widely as a dopant in the formation of III-IV semiconductor materials.

Recommended products

Stainless steel regulators Z527416 or Z527424 are recommended.

Safety Information

• Pictograms: GHS02,GHS04
• Signal Word: Danger
• Hazard Statements: H220,H280
• Precautionary Statements: P210 - P377 - P381 - P410 + P403
• Hazard Classifications: Flam. Gas 1A - Press. Gas Compr. Gas
• Storage Class Code: 2A - Gases
• WGK: WGK 1
• Flash Point(F): Not applicable
• Flash Point(C): Not applicable
• Personal Protective Equipment: dust mask type N95 (US), Eyeshields, Gloves