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NIST2134

Arsenic implant in silicon depth profile standard

NIST SRM 2134

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About This Item

UNSPSC Code:
41116107
NACRES:
NA.24

grade

certified reference material

Quality Level

packaging

pkg of each

manufacturer/tradename

NIST®

application(s)

semiconductor

format

matrix material

General description

Each unit of SRM 2134 contains a single crystal silicon substrate, measuring 1 cm by 1 cm, which is ion-implanted with the isotope 75 As at an approximate energy of 100 keV.

SRM 2134_cert

SRM 2134_SDS

Application

The SRM is used to calibrate the secondary ion response to detect the minor and trace levels of arsenic within a silicon matrix using the analytical technique of secondary ion mass spectrometry (SIMS).

Features and Benefits

  • Available with a certificate documenting NIST-certified value for retained dose of 75As atoms and the dose is expressed in units of arsenic mass per unit area.
  • The reference and information values of elements are reported as mass fraction.
  • Certified values are retained dose of 75As atoms, and the dose is expressed in units of arsenic mass per unit area.
  • The NIST certificate is provided with expiration certificate, use, storage, handling, and maintenance instructions.

Other Notes

Example analytes are listed below as a reference. Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Arsenic (75As)

See certificate for values and more details at nist.gov/SRM.

Legal Information

NIST is a registered trademark of National Institute of Standards and Technology

related product

Storage Class Code

13 - Non Combustible Solids

WGK

nwg

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable


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