668990

Tris(diethylamido)(tert-butylimido)tantalum(V)

packaged for use in deposition systems

• Synonym(s): TBTDET, Tris(diethylamino)(tert-butylimino)tantalum(V)
• Linear Formula: (CH₃)₃CNTa(N(C₂H₅)₂)₃
• CAS Number: 169896-41-7
• Molecular Weight: 468.46
• MDL number: MFCD02684506
• UNSPSC Code: 12352103
• PubChem Substance ID: 24885014
• NACRES: NA.23

Properties

• Quality Level: 100
• Assay: ≥99.99% (trace metals analysis)
• form: liquid
• reaction suitability: core: tantalum
• density: 1.252 g/mL at 25 °C (lit.)
• SMILES string: CCN(CC)[Ta](=NC(C)(C)C)(N(CC)CC)N(CC)CC
• InChI: 1S/C4H9N.3C4H10N.Ta/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1;+3
• InChI key: YYKBKTFUORICGA-UHFFFAOYSA-N

Description

General description

Atomic number of base material: 73 Tantalum

Application

Precursors Packaged for Depositions Systems

Safety Information

• Pictograms: GHS02,GHS05
• Signal Word: Danger
• Hazard Statements: H225,H260,H314
• Precautionary Statements: P210 - P223 - P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• Hazard Classifications: Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1B - Water-react 1
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point(F): 114.8 °F - closed cup
• Flash Point(C): 46 °C - closed cup
• Personal Protective Equipment: dust mask type N95 (US), Eyeshields, Gloves