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Sigma-Aldrich

Chromium etchant

standard

Synonym(s):

Cr etching solution

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About This Item

MDL number:
UNSPSC Code:
12352300
NACRES:
NA.23

grade

standard

composition

volatiles, 85%

color

orange

bp

100 °C/1 atm

density

1.16 g/mL at 25 °C

General description

  • Appearance - Clear orange
  • pH - Acidic
  • Etch Rate at 40 °C - 40 Å/second
  • Etch Capacity (rate declines at ~70%) - 65 g/gallon
  • Shelf Life - 1 year
  • Storage Conditions - Ambient
  • Filtration - 0.2 µm
  • Recommended Operating Temperatures - 20-80 °C (30-40 °C most common)
  • Rinse - Deionized water
  • Photoresist Recommendations - KLT6000 Series, KLT 5300 Series, HARE SQT (SU-8 type), TRANSIST, or PKP -308PI
  • Select Compatible Materials - Au, Ti, oxide, nitride, Si
  • Select Incompatible Materials - Al, Ni, Cu, NiCr
  • Compatible Plastics - HDPE, PP, PTFE, PFA, PVC
  • Isotropy - Isotropic
  • Incompatible Chemicals - Strong bases
Ceric ammonium nitrate-based etchant. Etch rate of 40 Å/sec @ room temp. Etches cleanly with only a deionized water rinse needed.
Chromium etchant is a chromium based solution that removes the excess metal from the substrate. These etchants are majorly used in metal finishing and electronic industry. It has an etch rate of 4 mm/s and can be used to etch nickel, copper, and chromium based excess metals.
Our chromium etchant is high purity ceric ammonium nitrate system for precise, clean etching of chromium and chromium oxide films. Compatible with positive and negative photoresists. Our chromium etchant is filtered to remove all particulates above 0.2 microns. Etching temperature varies depending on film thickness. Etch times range from 15 seconds to 60 seconds at room temperature. Chromium Etchants should be operated in a well-ventilated hood.

Application

The product can etch Al, Cr, Cu, Ni, GaAs. It can surface oxidize Si, Ta/TaN, however, it has no effect on Au, Si3N4, SiO2, Ti, and W surfaces
For use at room temperature or elevated temperature. Etches cleanly, eliminating need for an intermediate rinse. Etching temperature varies with regard to film thickness. Etch times range from 15 to 60 seconds at room temperature. Note, chromium etchants should be handled in a well ventilated hood.

Features and Benefits

Designed for precise, clean etching of chromium and chromium oxide films. Compatible with both positive and negative photoresists. Filtered to 0.2 micron to remove particlulates.

Signal Word

Danger

Hazard Statements

Hazard Classifications

Aquatic Chronic 2 - Eye Dam. 1 - Met. Corr. 1 - Ox. Liq. 2 - Skin Corr. 1B - Skin Sens. 1

Supplementary Hazards

Storage Class Code

5.1B - Oxidizing hazardous materials

WGK

WGK 3

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable


Certificates of Analysis (COA)

Search for Certificates of Analysis (COA) by entering the products Lot/Batch Number. Lot and Batch Numbers can be found on a product’s label following the words ‘Lot’ or ‘Batch’.

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Protocols

Photoresist kit offers pre-weighed chemical components for lithographic processes, with separate etchants for various substrate choices.

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