496863

Pentakis(dimethylamino)tantalum(V)

99.99%

• Synonym(s): PDMAT, TADMA, Ta(NMe₂)₅, Tantalum dimethylamide
• Linear Formula: Ta(N(CH₃)₂)₅
• CAS Number: 19824-59-0
• Molecular Weight: 401.33
• MDL number: MFCD01631286
• UNSPSC Code: 12352103
• PubChem Substance ID: 24873088
• NACRES: NA.23

Properties

• Assay: 99.99%
• form: solid
• reaction suitability: core: tantalum; reagent type: catalyst
• mp: 100 °C (dec.) (lit.)
• SMILES string: CN(C)[Ta](N(C)C)(N(C)C)(N(C)C)N(C)C
• InChI: 1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5
• InChI key: VSLPMIMVDUOYFW-UHFFFAOYSA-N

Description

General description

Atomic number of base material: 73 Tantalum

Features and Benefits

Volatile solid CVD precursor to tantalum nitride (TaN) thin films. Also yields tantalum oxide (Ta₂O₅) thin films when O₂, H₂O, NO or H₂O₂ is present during the deposition process. Ta₂O₅ thins films show promise as gate dielectric materials in the manufacture of integrated circuits.

Safety Information

• Pictograms: GHS02,GHS05
• Signal Word: Danger
• Hazard Statements: H228,H260,H314
• Precautionary Statements: P210 - P231 + P232 - P260 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• Hazard Classifications: Eye Dam. 1 - Flam. Sol. 1 - Skin Corr. 1B - Water-react 1
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point(F): Not applicable
• Flash Point(C): Not applicable
• Personal Protective Equipment: dust mask type N95 (US), Eyeshields, Gloves